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OPERATION INSTRUCTION

TFS 200

N815881

Rev. E

Created:

Toni Parvela, 2010-06-16 16:59:32

Page: 2 (33)

Updated:

ZZ, 2010-06-28 10:05:46

Table of contents

1 Operating instructions ......................................................................... 4

1.1 General notes .................................................................................... 4

1.1.1 Scope of this manual ............................................................. 4

1.2 Startup and shut down procedures/Emergency stop ................................. 4

1.2.1 Cold startup / Recovery from emergency stop ........................... 4

1.2.2 Shut down for a longer period of time ...................................... 5

1.3 Brief operator instructions (manual operations, HMI) ................................ 5

1.4 Precursor delivery ............................................................................... 7

1.5 Source loading and unloading procedures ............................................... 8

1.5.1 Liquid source ....................................................................... 8

1.5.2 Hot source, HS 500 ............................................................. 12

1.5.3 Hot source, HS 300 ............................................................. 13

1.6 Source adjustments .......................................................................... 16

1.6.1 The gas lines ...................................................................... 17

1.6.2 The Ozone source ............................................................... 18

1.6.3 The liquid sources ............................................................... 19

1.6.4 The hot sources .................................................................. 20

1.7 Description of the flow system ............................................................ 21

1.7.1 The process gas flows .......................................................... 21

1.7.2 Gas flows for the instrumentation .......................................... 23

1.7.3 The vacuum system ............................................................ 23

1.8 Flow chart symbols ........................................................................... 23

1.8.1 Key components names ....................................................... 23

1.8.2 Diaphragm valves (DV) ........................................................ 24

1.8.3 Solenoid valves (SV) ........................................................... 25

1.8.4 Axial valves (AV) ................................................................ 25

1.8.5 Needle valves (NV) ............................................................. 26

1.8.6 Hand valves (HV) ................................................................ 26

1.8.7 Check valves (CV) ............................................................... 26

1.8.8 Gate valves (GV) ................................................................ 26

1.8.9 Relief valves (RV) ............................................................... 26

1.8.10 Mass flow controllers (MFC) .................................................. 27

1.8.11 Flow indicators (FT) ............................................................. 27