© Beneq 2020
1 Operating instructions
1.1 General notes
1.1.1 Scope of this manual
The TFS 200 is designed to be a flexible ALD tool for research. It gives high freedom
for the process engineer to adapt it to daily needs. The flow system is easy to change
and it is possible to run many different types of recipes with TFS 200 system. The
high freedom of using and modifying the TFS 200 system makes it possible to run
this reactor even in undesirable mode. Thus, when changing the precursor tubing
and recipe, the process engineer has to fully understand the operation of the system.
This manual is built to be a handy set of information for the advanced user for getting
a good understanding of the reactor operation and for getting the most out of TFS
200 features. Simple daily operations are described in the chapter "Brief operator
instructions” of this manual.
1.2 Startup and shut down procedures/Emergency stop
1.2.1 Cold startup / Recovery from emergency stop
The cold startup procedure is the following:
-Check the overall condition of the system.
-Open any shutoff hand valves in the carrier gas, instrument gas, and process gas
inlets if closed.
-Turn on the tool main switch located in the electric cabinet.
-Wait approximately 1-2 min, PLC starts.
-Start TFS 200 HMI on the computer, log in to TFS 200 HMI using the valid username
and password.
-Acknowledge pop-up windows related to cold start. E-stop must be acknowledged
by pressing Ack Estop button from HMI top header.
Figure: Control page of TFS 200 HMI
To Next Page