Brooks FluidX Scope USB

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Brooks Automation FluidX

Part Number: 281947 Rev. C

Brooks Automation, Inc.

Informationprovidedwithinthisdocumentissubjecttochangewithoutnotice,and

althoughbelievedtobeaccurate,BrooksAutomation,Inc.assumesnoresponsibilityfor

anyerrors,omissions,orinaccuracies.

ABF™,AcuLigner™,AdvanTag™,Align™,AquaTran™,AutoTeach™,ATR™,

AXM™,BasicBlue™,BioStore™,BiSymmetrik™,CenterSmart™,CoolSolutions™,

CratetoOperate™,CrossingConnect™,Cryotiger™,DARTS™,Enerta™,e-RMA™,

e-Spares™,e-Volution™,Falcon™,FastRegen™,FIXLOAD™,FrogLeg™,

IndependentTwinLinearExchange™,InCooler™,InLigner™,Interface™,Isoport™,

ITLX™,Jet™,JetEngine™,LEAP™,LowProfile™,M2Nano™,PASIV™,

PowerPak™,PerformanceBlue™,PlateAuditor™,PowerPak™,PowerTools™,

QuadraFly™,Radius™,Radient™,RadientExpress™,RapidThaw™,Reliance™,

RelianceATR™,RetroEase™,SCARA™,SmartPM™,SPOTLevel™,Sprint™,

Synetics™,TheNewPathwaytoProductivity™,TimeOptimizedTrajectory™,Time

OptimalTrajectory™,TimeOptimizedPath™,TopCooler™,TopLigner™,Tube

Auditor™,UltimateBlue™,VAC-407™,VacuTran™,VersaPort™,andWaferEngine™

aretrademarksofBrooksAutomation,Inc.

AcuTran®,AquaTrap®,Asyst®,theCoolSolutionslogo,CrossingAutomation®,

Cryodyne®,Cryo-Torr®,Fusion®,GOLDLink®,Guardian®,GUTS®,Helix®,

Leapfrog®,MagnaTran®,MapTrak®,Marathon®,Marathon2®,MarathonExpress®,

On-Board®,Polycold®,Razor®,REMP®,Spartan®,TrueBlue®,TurboPlus®,Vision®,

Xpeel®,XTape®,Zaris®,theBrookslogo,andtheBrooksLifeScienceslogoare

registeredU.S.trademarksofBrooksAutomation,Inc.

Allothertrademarksarepropertiesoftheirrespectiveowners.

manualisproprietaryinformationofBrooksAutomation,Inc.andisprovidedfortheuse

ofBrookscustomersonlyandcannotbeusedfordistribution,reproduction,orsale

withouttheexpresswrittenpermissionofBrooksAutomation,Inc.

ThistechnologyissubjecttoUnitedStatesexportAdministrationRegulationsand

authorizedtothedestinationonly;diversioncontrarytoU.S.lawisprohibited.

OriginalmanualprintedinEnglish.

Brooks FluidX Scope USB - Page 2