Brooks Automation FluidX
Part Number: 281947 Rev. C
Brooks Automation, Inc.
Informationprovidedwithinthisdocumentissubjecttochangewithoutnotice,and
althoughbelievedtobeaccurate,BrooksAutomation,Inc.assumesnoresponsibilityfor
anyerrors,omissions,orinaccuracies.
ABF™,AcuLigner™,AdvanTag™,Align™,AquaTran™,AutoTeach™,ATR™,
AXM™,BasicBlue™,BioStore™,BiSymmetrik™,CenterSmart™,CoolSolutions™,
CratetoOperate™,CrossingConnect™,Cryotiger™,DARTS™,Enerta™,e-RMA™,
e-Spares™,e-Volution™,Falcon™,FastRegen™,FIXLOAD™,FrogLeg™,
IndependentTwinLinearExchange™,InCooler™,InLigner™,Interface™,Isoport™,
ITLX™,Jet™,JetEngine™,LEAP™,LowProfile™,M2Nano™,PASIV™,
PowerPak™,PerformanceBlue™,PlateAuditor™,PowerPak™,PowerTools™,
QuadraFly™,Radius™,Radient™,RadientExpress™,RapidThaw™,Reliance™,
RelianceATR™,RetroEase™,SCARA™,SmartPM™,SPOTLevel™,Sprint™,
Synetics™,TheNewPathwaytoProductivity™,TimeOptimizedTrajectory™,Time
OptimalTrajectory™,TimeOptimizedPath™,TopCooler™,TopLigner™,Tube
Auditor™,UltimateBlue™,VAC-407™,VacuTran™,VersaPort™,andWaferEngine™
aretrademarksofBrooksAutomation,Inc.
AcuTran®,AquaTrap®,Asyst®,theCoolSolutionslogo,CrossingAutomation®,
Cryodyne®,Cryo-Torr®,Fusion®,GOLDLink®,Guardian®,GUTS®,Helix®,
Leapfrog®,MagnaTran®,MapTrak®,Marathon®,Marathon2®,MarathonExpress®,
On-Board®,Polycold®,Razor®,REMP®,Spartan®,TrueBlue®,TurboPlus®,Vision®,
Xpeel®,XTape®,Zaris®,theBrookslogo,andtheBrooksLifeScienceslogoare
registeredU.S.trademarksofBrooksAutomation,Inc.
Allothertrademarksarepropertiesoftheirrespectiveowners.
©2020BrooksAutomation,Inc.Allrightsreserved.Theinformationincludedinthis
manualisproprietaryinformationofBrooksAutomation,Inc.andisprovidedfortheuse
ofBrookscustomersonlyandcannotbeusedfordistribution,reproduction,orsale
withouttheexpresswrittenpermissionofBrooksAutomation,Inc.
ThistechnologyissubjecttoUnitedStatesexportAdministrationRegulationsand
authorizedtothedestinationonly;diversioncontrarytoU.S.lawisprohibited.
OriginalmanualprintedinEnglish.
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Copyright © 2020, Brooks Automation, Inc.