Brooks FluidX Scope USB - Preventative Maintenance

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Brooks Automation FluidX

Part Number: 281947 Rev. C

9. Preventative

Maintenance

Periodicallycleanthescanningwindowwithamoist,

non-abrasiveclothtoallowthebestperformanceofthe

device.Thefollowingaresafetouseforcleaningas

needed:

l IPA(IsopropylAlcohol)

l 70%alcohol

l Cleanroomwipes

l Milddetergents