Brooks Automation
Part Number: 281947 Rev. C
PartNumber:281947
FluidXScopeUSBUserManual
Revision ECO Number Date
Explanation
of Changes
Revision5 07/2014
Initial
completionof
themanual.
RevisionA 95874 4/25/2017 ImageUpdates
RevisionB EC107106 10/1/2018
BrooksRe-
Brandingand
applicationof
Brooks
Templates.
RevisionC EC118417 3/12/2020
Updated:
Newbarcodes
inchapterQuick
SetupCodes.
LEDandaudio
feedbacksin
chapterReader
Feedback.
Copyright © 2018, Brooks Automation, Inc.
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Copyright © 2020, Brooks Automation, Inc.
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