Brooks GF100 Series User Manual

Installation and Operation Manual
X-DPT-RS485-GF100-Series-MFC-eng
Part Number: 541B183AAG
March, 2020
RS485 L-Protocol Supplemental Manual
for GF100 Series Mass Flow Controllers
and Meters
Brooks
®
GF125 Series and GF135 Series

Brooks GF100 Series Specifications

General

Type	Mass Flow Controller
Gas Compatibility	Various (depends on model)
Operating Temperature	0 to 50°C
Communication Protocol	Analog (0-5 VDC, 4-20 mA), Digital (RS-485)
Power Supply	15-24 VDC
Process Connection	1/4" Swagelok

Summary

Background and Message Format

2.3. Message Format

Message Protocol Details

3.1. Query for MAC ID

Master controller queries the existence of a MFC controller via a specific message format.

3.2. Digital Mode Selection

Master controller sets the MFC to digital or analog mode using a specific message.

3.5. New Setpoint

Master controller sends a new set point value to the MFC.

3.8. Indicated Flow

Master controller gets the current flow reading from the MFC.

3.10. Calibration Instance Selection

Master controller selects the calibration instance for flow metering.

3.13. Auto Zero Enable/Disable

Master controller enables or disables the auto zero function of the MFC.

Software Design Requirements

4.1. Transaction Scenarios

4.5. Setpoint Conversion

Explains the conversion of setpoint values between percentage and hexadecimal format.

4.6. Sensor Zero Filter & Calibration

Discusses sensor zero filter, requested zero, and auto zero for calibration and maintenance.

4.7. Calibration Instances & Modes

Appendix: Tool - Device Communication

6.1. Setting MAC ID

Explains how to set software-configurable MAC IDs for MFCs.