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Brooks GF120XSL Series - User Manual

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GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Brooks
®
GF Series
High Performance Gas Flow Controllers
Model GF125 Analog I/O
Model GF125 Digital I/O

Table of Contents

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Summary

Essential Instructions

Pressure Equipment Directive (PED)

Describes compliance with the PED for pressure equipment.

ESD (Electrostatic Discharge)

Outlines precautions for handling ESD-sensitive components.

Section 2 Product Description

Operating Principles

Explains how the GF1XX controller functions and its proprietary technologies.

Specifications for GF Series Controllers

Details technical specifications like materials, electrical, and operating conditions.

Specifications for GF120 XSD Series Controllers

Lists specific technical parameters for the GF120XSD model.

Specifications for GF120 XSL Series Controllers

Lists specific technical parameters for the GF120XSL model.

Section 3 Installation Instructions

Purge the Gas Supply Line Before GF1 XX Installation

Details the critical steps for purging gas lines.

Position and Mount the GF1 XX

Guides on physically installing the controller, including orientation.

Perform a Leak Test

Explains the importance and procedure for leak testing.

Section 4 MultiFlo Configurator

Configure the Gas and Flow Range

Details the process of setting up gas and flow parameters.

Section 5 Performance Checks

Zeroing the GF1 xx Pressure Transducer

Specific steps for zeroing the pressure transducer.

Zeroing GF1 xx Flow

Specific steps for zeroing the flow reading.

Section 6 Maintenance Requirements

Section 7 System Troubleshooting

OEM Troubleshooting Checklist

A checklist for identifying common issues.

GF1 XX Troubleshooting Guide

A detailed guide for diagnosing and resolving GF1XX problems.

Section 8 Removal and Return Instructions

Purge Gas Lines Before Removing the GF1 XX

Instructions for safely purging lines before removal.

Appendix A: Product Description Code

LIMITED WARRANTY

Summary

Essential Instructions

Pressure Equipment Directive (PED)

Describes compliance with the PED for pressure equipment.

ESD (Electrostatic Discharge)

Outlines precautions for handling ESD-sensitive components.

Section 2 Product Description

Operating Principles

Explains how the GF1XX controller functions and its proprietary technologies.

Specifications for GF Series Controllers

Details technical specifications like materials, electrical, and operating conditions.

Specifications for GF120 XSD Series Controllers

Lists specific technical parameters for the GF120XSD model.

Specifications for GF120 XSL Series Controllers

Lists specific technical parameters for the GF120XSL model.

Section 3 Installation Instructions

Purge the Gas Supply Line Before GF1 XX Installation

Details the critical steps for purging gas lines.

Position and Mount the GF1 XX

Guides on physically installing the controller, including orientation.

Perform a Leak Test

Explains the importance and procedure for leak testing.

Section 4 MultiFlo Configurator

Configure the Gas and Flow Range

Details the process of setting up gas and flow parameters.

Section 5 Performance Checks

Zeroing the GF1 xx Pressure Transducer

Specific steps for zeroing the pressure transducer.

Zeroing GF1 xx Flow

Specific steps for zeroing the flow reading.

Section 6 Maintenance Requirements

Section 7 System Troubleshooting

OEM Troubleshooting Checklist

A checklist for identifying common issues.

GF1 XX Troubleshooting Guide

A detailed guide for diagnosing and resolving GF1XX problems.

Section 8 Removal and Return Instructions

Purge Gas Lines Before Removing the GF1 XX

Instructions for safely purging lines before removal.

Appendix A: Product Description Code

LIMITED WARRANTY

Brooks GF120XSL Series Specifications

General IconGeneral
TypeMass Flow Controller
Product SeriesGF120XSL Series
Linearity±0.5% of Full Scale
CE ComplianceYes
RoHS ComplianceYes
Operating Temperature5°C to 50°C
Wetted Materials316L stainless steel
Electrical ConnectionsD-Sub Connector
Analog Input0-5 VDC or 4-20 mA
Analog Output0-5 VDC or 4-20 mA
Communication ProtocolAnalog
Pressure DropVaries by model and flow rate

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