EasyManuals Logo

Brooks GF120XSL Series User Manual

Default Icon
62 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Page #35 background imageLoading...
Page #35 background image
7-1
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Section 7 System Troubleshooting
7-1 Introduction
This section includes an OEM tool Troubleshooting Checklist and an
GF1XX Troubleshooting Guide that identifies symptoms, possible causes,
and corrective actions.
7-2 OEM Troubleshooting Checklist
1. Check environmental factors that could affect changes to GF1XX
performance. The most common environmental factors are listed in
Table 7-1.
2. Check supply voltage and check for a consistent ground.
3. Insure OEM tool setpoint matches the setpoint at the GF1XX. Observe
for consistency.
4. Verify isolations valves are open and the gas supply is turned on. Then
verify operating pressures are within operating ranges.
5. Check GF1XX voltage response by moving the setpoint back and forth.
Observe for voltage changes.
Table 7-1 Environmental Factors
GF1XX Performance Possible Causes
Inaccurate flow. Temperature shift (steady state or transient).
Inlet pressure shift (steady state or transient).
Power supply problem.
Electrical interference
Dirty gas chamber
Changes in gas.
Control problems. Can Differential pressure not within operatiing range
not reach setpoint. Inlet pressure not stable
Oscillation.
Zeroing problems, Indicated Temperature shift (steady state or transient).
zero is not stable. Inlet pressure shift (steady state or transient).
Power supply problem.
Electrical interference

Table of Contents

Questions and Answers:

Question and Answer IconNeed help?

Do you have a question about the Brooks GF120XSL Series and is the answer not in the manual?

Brooks GF120XSL Series Specifications

General IconGeneral
BrandBrooks
ModelGF120XSL Series
CategoryController
LanguageEnglish

Related product manuals