5-1
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Section 5 Performance Checks
5-1 Introduction
Four major conditions are required to ensure the GF1XX is operating
properly once installation has been completed:
•The GF1XX must be warmed up for at least 30 minutes.
•The active gas page must be correct.
•The GF1XX pressure transducer must be correctly zeroed.
•The GF1XX flow must be correctly zeroed.
This chapter describes how to zero and sequence the GF1XX for proper
operation.
5-2 Zeroing Setup Process
The following steps are required before the GF1XX is zeroed.
1. Make sure that the GF1XX has been installed inside the equipment
(panel) for at least four hours and powered up at least one hour prior to
zeroing. This insures that the GF1XX is in its "use attitude" and is
operating at normal temperature. If the GF1XX is subjected to a
vacuum purge for more than one minute, turn off the GF1XX (ie.,
provide a zero setpoint) for a time period of twice the vacuum purge
time.
2. Refer to Figure 3-1 (page 10). Open the upstream shut-off valve (5) and
close the downstream shut-off valve (7). This eliminates a pressure
drop across the GF1XX and subsequent leakage from the PID control
valve inside the GF1XX.
3. Provide a 100% setpoint to the GF1XX for no longer than 60 seconds.
This equalizes the pressure across the PID control valve.
4. Refer to Figure 3.1. Close the upstream shut-off valve (5) to prevent any
pressure effects from the regulator (3).
5. Close the GF1XX and wait two minutes.
6. Read the output signal of the GF1XX. This output signal is the initial flow
in percent of full scale. The output signal should be 0.0 (± 0.1%). If the
output signal is too high, re-zero the GF1XX as described in Section 5-3.
To Next Page
Loading...
Need help?
General
