2-6
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Section 2 Product Descripton
Standard
Configuration
Bin Value
Flow Range
(N2 Equivalent)
(min.-max.
sccm
Digital
RS485
Analog
Digital
DeviceNet
GF 125
Foo tprint
(inches)
1.125 or 1.5
1.125 or 1.5
1.125 or 1.5
1.125 or 1.5
1.125 or 1.5
1.125 or 1.5
1.125 or 1.5
1.125 or 1.5
1.125 or 1.5
1.125 or 1.5
1.125 or 1.5
YES
YES
YES
YES
YES
YES
Low Flow
SH40
SH41
Medium Flow
SH42
SH43
SH44
SH45
Hig hFlow
SH46
SH47
SH48
SH49
SH50
3-10
11-30
31-92
93-280
281-860
861-2600
2601-7200
7201-15000
15001-30000
30001-40000
40001-55000
2-7 Standard Features
GF1XX standard features are described in the following sections. Refer to
Sections 2-3 to 2-4-2 for specifications and detailed operating parameters.
2-7-1 Mounting Attitude
Mounting attitudes are software configurable to various positions to fit your
particular application. Various mounting attitude positions are described in
Section 3.
2-7-2 Factory Setup Conditions
GF1XXs ordered as "Atmosphere" are configured with the GF1XX outlet
exhausting to atmosphere. GF1XXs ordered as "Vacuum" are configured
with the GF1XX exhausting to vacuum.
2-7-3 Calibration Traceability
Calibration traceability conforms to the National Institute of Standards and
Technology (N.I.S.T.)
2-7-4 Manufacturing Environment
GF1XXs are assembled, calibrated, tested, and packaged at the factory
in a Class 100 clean room environment.
2-7-5 Materials
GF1XXs use SEMI-F20 gas compliant materials with an available surface
finish of 10 µ inch Ra for the GF100 and 4 µ inch Ra for the GF120 and
GF125.
Table 2-2 GF1XX Flow Range And Communication Protocols
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