Brooks GF120XSL Series User Manual

A-3
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Appendix A: Product Description Code
Example:
XX C SH40 010C VX A O
*DX XXXX A A 000
GF120 C
XX
SD
VX
CX
DX
WX
YX
AX
BX
LX
EX
A
V
DX
EX
GX
G1
KX
BB
XXXX
===>
SH40
SH41
SH42
SH43
SH44
SH45
SH46
SH47
SH48
SH49
SH50
===>
010C
030C
092C
280C
860C
2.6L
7.2L
015L
030L
040L
055L
GF120
Congurable
Gas Specic
Flow Ranges from 3 sccm–30 slpm N
2
Equivalent
Standard Application
Safe Delivery Application (Available on GF120 Only)
Normally Closed
Normally Open Valve
Valve
1-1/2" VCR 1/4"
1-1/8" C Seal 92mm
1-1/8" C Seal 80mm
1-1/8" W Seal 92mm
1-1/8" W Seal 80mm
1-1/2" C Seal 92mm
1-1/2" W Seal 92mm
1-1/8” C Seal 92mm w/Poke Yoke
1 1/2" W Seal 80mm
Atmosphere
Vacuum
5 Pin DEVICENET M8
Cable Adapter to Cardedge (w/out VTP), RS485 through RJ11 Jacks;
Display & Overlay w/180° Orientation
9 Pin D W/RS-485 (UDG9), Display/Overlay w/180° Orientation
9 Pin D W/RS-485 (UDG9)
Cable Adapter to MKS 15 Pin D (UDK 15)
5 Pin DeviceNet™ M8 w/Analog
Auto Shut O (Included)
Auto Shut O (Not Included)
Customer Special Request Number
Standard Flow Sensor (Default)
Application Specic Gas and Range, i.e. “0004” = Argon and “010L” = 10 slpm
Standard Conguration # 40, 3–10 sccm N
2
Equivalent
Standard Conguration # 41, 11–30 sccm N
2
Equivalent
Standard Conguration # 42, 31–92 sccm N
2
Equivalent
Standard Conguration # 43, 93–280 sccm N
2
Equivalent
Standard Conguration # 44, 281–860 sccm N
2
Equivalent
Standard Conguration # 45, 861–2600 sccm N
2
Equivalent
Standard Conguration # 46, 2601–7200 sccm N
2
Equivalent
Standard Conguration # 47, 7201–15000 sccm N
2
Equivalent
Standard Conguration # 48, 15001–30000 sccm N
2
Equivalent
A
X
Auto Zero (Included)
Auto Zero (Not Included)
A
X
0°C Reference Calibration (Standard)
21°C Reference Calibration (Normal)
Customer To Specify Temperature
000
021
XXX
C
O
C
X
O
Standard Conguration # 49, 30001–40000 sccm N Equivalent
Standard Conguration # 50, 40001–55000 sccm N Equivalent
2
2
Table A-3 GF120 Product Description Code Table

Brooks GF120XSL Series Specifications

General

Brand	Brooks
Model	GF120XSL Series
Category	Controller
Language	English