C-1
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Appendix C: GF1xx Gas Table
Table C-1 GF1XX Gas Table - Codes 1-97, Bins SH40 to SH45
SH40-SH47 SH48 SH49 SH50 Low High Low High Low High Low High Low High Low High
1
He Helium 19.7 24.7 29.7 5 14 15 42 43 128 129 400 401 1194 1195 3609
2
Ne Neon 24.7 5 14 15 42 43 129 130 400 401 1207 1208 3650
4
Ar Argon 24.7 29.7 39.7 44.7 5 14 15 42 43 130 131 400 401 1214 1215 3671
5
Kr Krypton 29.7 4 11 12 32 33 100 101 300 301 930 931 2800
6
Xe Xenon 24.7 3 6 7 19 20 58 59 178 179 546 547 1651
7
H2 Hydrogen 14.7 14.7 19.7 3 10 11 30 31 92 93 280 281 860 861 2600
8
Air Air 24.7 29.7 3 10 11 30 31 92 93 280 281 860 861 2600
9
CO Carbon Monoxide 24.7 29.7 3 10 11 30 31 92 93 280 281 860 861 2600
10
HBr Hydrogen Bromide 24.7 3 8 9 25 26 77 78 235 236 723 724 2187
11
HCl Hydrogen Chloride 24.7 29.7 3 10 11 30 31 92 93 280 281 860 861 2600
13
N2 Nitrogen 24.7 29.7 29.7 32.7 3 10 11 30 31 92 93 280 281 860 861 2600
15
O2 Oxygen 24.7 29.7 3 10 11 30 31 92 93 280 281 860 861 2600
16
NO Nitric Oxide 24.7 29.7 3 10 11 30 31 92 93 280 281 860 861 2600
17
HI Hydrogen Iodide 24.7 29.7 3 5 6 15 16 46 47 141 142 432 433 1305
18
F2 Fluorine 24.7 29.7 3 9 10 27 28 83 84 254 255 780 781 2358
19
Cl2 Chlorine 24.7 29.7 3 6 7 19 20 57 58 173 174 531 532 1604
22
H2S Hydrogen Sulfide 24.7 29.7 3 8 9 25 26 76 77 232 233 713 714 2155
23
H2Se Hydrogen Selenide 24.7 29.7 3 7 8 22 23 66 67 202 203 620 621 1874
25
CO2 Carbon Dioxide 24.7 29.7 29.7 29.7 3 7 8 22 23 69 70 209 210 642 643 1942
27
N2O Nitrous Oxide 24.7 29.7 3 7 8 21 22 65 66 200 201 611 612 1849
28
CH4 Methane 24.7 24.7 29.7 3 8 9 23 24 71 72 215 216 660 661 2000
29
NH3 Ammonia 24.7 24.7 3 8 9 24 25 73 74 223 224 685 686 2072
31
PH3 Phosphine 19.7 24.7 3 7 8 22 23 67 68 205 206 629 630 1901
32
SO2 Sulfur Dioxide 19.7 24.7 3 6 7 17 18 52 53 157 158 483 484 1459
33
CH3F Methyl Fluoride 24.7 29.7 3 7 8 22 23 67 68 204 205 625 626 1890
34
COS Carbonyl Sulfide 24.7 29.7 3 7 8 20 21 60 61 183 184 562 563 1700
38
C2H4 Ethylene 24.7 29.7 3 6 7 17 18 54 55 163 164 501 502 1516
39
SiH4 Silane 24.7 29.7 3 6 7 18 19 56 57 170 171 523 524 1581
42
C2H2 Acetylene 16.7 19.7 3 6 7 18 19 57 58 170 171 530 531 1600
43
GeH4 Germane 24.7 29.7 3 6 7 17 18 53 54 161 162 495 496 1500
48
BF3 Boron Trifluoride 19.7 24.7 3 5 6 16 17 50 51 150 151 457 458 1381
49
CHF3 Fluoroform (Freon-23) 24.7 24.7 24.7 26.7 3 5 6 16 17 48 49 145 146 445 446 1344
53
NF3 Nitrogen Trifluoride 24.7 29.7 3 5 6 15 16 46 47 140 141 430 431 1300
58
B2H6 Diborane 19.7 19.7 3 4 5 12 13 38 39 116 117 358 359 1082
62
PF3 Phosphorus Trifluoride 19.7 24.7 3 4 5 14 15 42 43 129 130 400 401 1200
63
CF4 Carbon Tetrafluoride (Freon-14) 24.7 24.7 24.7 26.7 3 4 5 13 14 40 41 121 122 372 373 1123
67
SiH2Cl2 Dichlorosilane 14.7 19.7 3 3 4 10 11 29 30 89 90 273 274 824
69
C3H6-b) Propylene 19.7 19.7 3 4 5 12 13 36 37 110 111 338 339 1022
70
BCl3 Boron Trichloride 11.7 14.7 3 3 4 10 11 31 32 94 95 289 290 874
72
ClO3F Perchloryl Fluoride 14.7 20.7 3 4 5 12 13 38 39 114 115 350 351 1060
77
ClF3 Chlorine Trifluoride 14.7 20.7 3 4 5 11 12 35 36 107 108 327 328 1000
85
C2H7N Dimethylamine 9.7 14.7 3 3 4 11 12 34 35 101 102 310 311 960
88
SiF4 Silicon Tetrafluoride 19.7 24.7 3 4 5 11 12 34 35 103 104 316 317 1000
94
C2F4 Tetrafluoroethylene 19.7 19.7 3 3 4 10 11 31 32 100 101 300 301 900
97
Si2H6 DISILANE 19.7 19.7 3 3 4 10 11 30 31 92 93 282 283 853
Min inlet pressure for vac. exhaust
(PSIA)
Gas
Code Gas S
mbol Gas Name
SH44SH40 SH43SH42SH41 SH45
For reference only, consult factory on the latest tables.
C-1 GF1XX Gas Table
Table C-1 GF1XX Gas Table
(Reference the following pages C-1 Through C-4).
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