2-4
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Section 2 Product Descripton
2-5 Product Labeling
The GF1XX is generally described on the top label as shown in Table 2-1.
The GF1XX configuration is described in greater detail on the side can
label (Figure 2-3).
2-4-1 Specifications for GF120XSD Series Controllers
NOTE: Materials of Construction, Electrical and Performance specifications
are the same as stated in Section 2-4.
Operating Conditions for GF120XSD
Flow Range (FS) 5-200 sccm
Min Operating Inlet
Pressure 10 Torr for 5-10sccm 15 Torr for 11-20sccm 20 Torr for 21-50sccm 25 Torr for 51-200sccm
Burst Pressure 1500 psia max 1500 psia max 1500 psia max 1500 psia max
Proof Pressure 500 psia max 500 psia max 500 psia max 500 psia max
Differential Pressure* 10 Torr-30 psid Typ. 10 Torr-30 psid Typ 10 Torr-30 psid Typ 10 Torr-30 psid Typ
Valve Configuration Normally Closed Normally Closed Normally Closed Normally Closed
Temperature Range 10
o
C-50
o
C10
o
C-50
o
C10
o
C-50
o
C10
o
C-50
o
C
*Typical pressure drop. Actual pressure drop wil be gas and flow range dependent.
Consult technical support for details.
2-4-2 Specifications for GF120XSL Series Controllers
NOTE: Materials of Construction, Electrical and Performance specifications
are the same as stated in Section 2-4.
Operating Conditions for GF120XSL
Flow Range (FS) 4-25 sccm
Min Operating Inlet
Pressure 6 Torr for 4-6sccm 10 Torr for 7-10sccm 12 Torr for 11-25sccm
Burst Pressure 1500 psia max 1500 psia max 1500 psia max
Proof Pressure 500 psia max 500 psia max 500 psia max
Differential Pressure* 10 Torr-30 psid Typ. 10 Torr-30 psid Typ 10 Torr-30 psid Typ
Valve Configuration Normally Closed Normally Closed Normally Closed
Temperature Range 10
o
C-50
o
C10
o
C-50
o
C10
o
C-50
o
C
*Typical pressure drop. Actual pressure drop wil be gas and flow range dependent.
Consult technical support for details.
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