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Brooks GF120XSL Series User Manual

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2-5
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Section 2 Product Descripton
Figure 2-3 GF125 Side Can Label
Table 2-1 GF1XX Top Label
2-6 Model Code Description
Gas Flow Controller models have a GF1XX prefix: GF1XXCXXC. The
GF1XX is available in low, medium, and high flow configurations. Flow
ranges are available from 3 to 55000 sccm (N2 equivalent). GF1XX
models can have a 1.125 or a 1.5 inch mechanical footprint. The letter C
next to the model number (i.e., GF1XXC) indicates that the flow controller
is MultiFlo configurable to a specific flow range. Flow ranges and I/O
communication protocols are identified in Table 2-2. A comprehensive
Product Description Code (PDC) is shown in Appendix A.
Top Label Contents Sample of "Top Label"
Serial Number A9253017027
Gas/Range NH3 5000 sccm
Part Number (or user defined) GF125C-845031

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Brooks GF120XSL Series Specifications

General IconGeneral
BrandBrooks
ModelGF120XSL Series
CategoryController
LanguageEnglish

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