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Brooks MFM User Manual

Brooks MFM
52 pages
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Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
1
Brooks
®
MF Smart Series MFC/MFM
Smart Mass Flow Controller

Table of Contents

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Brooks MFM Specifications

General IconGeneral
TypeMass Flow Controller
Flow RangeVarious ranges available (model dependent)
Operating PressureVaries depending on the model; some models are vacuum-compatible, others can handle high pressure. Consult specific model datasheet.
Operating Temperature0°C to 50°C
MaterialsStainless steel, elastomers (model dependent)
Electrical ConnectionsTypically D-sub connectors or terminal blocks. Consult specific model datasheet.
Output Signal0-5 VDC, 0-10 VDC, 4-20 mA
Input SignalAnalog (0-5V, 0-10V, 4-20mA), digital (model dependent)

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