Brooks MFM - Table 5-1: Flow Ranges and Pressure Rating

Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
27
* UL and cUL recognized with Pg11 or M20x1.5 cable
gland for: Class I Division 2, Groups A,B,C,D and
Class II Division 2, Groups F and G and Class III
Class I Zone 2 Group IIC, IIB, IIA T3C, Ambient/
gas temperature 40°F - 150°F (5°C - 65°C) Class 2
Power Supply, 28 Vdc max., 370 mA for controllers
and 90 mA for meters.
Protection Grade IP 65 and NEM
Table 5-1: Flow ranges and pressure rating
Setpoint Input * Voltage: 0 - 5 Vdc or 1 - 5 Vdc input
(not for Probus) impedance > 2000 Ohm
or Current: 0 - 20 mA or 4-20 mA
250 Ohm impedance
Analogue Voltage: 0 - 5 Vdc or 1 - 5 Vdc
Outputs* > 2000 Ohm
(not for Probus) and Current: 0-20 mA or 4-20 mA
Max. loop resistance 375 Ohm.
Digital RS-232 or RS-485*
Communication* Baud rate 1200, 2400, 3600, 4800, 7200, 9600,
9K2, 38K4* (Default: RS-232, Baudrate 9600)
Probus DP*
Alarm If self-diagnostics detect a fallure, the alarm mode
will be Analogue activated. (TTL) Open Collector
output, signal grounded when activated. Max. 30
Vdc, 25 mA. (not for Probus)
Or via communication port, when used digitally.
5 Vdc ref. 5 Vdc reference voltage load impedance
(not for Probus) >2000 Ohm
* To be specied at ordering
Brooks Smart Mass Flow Products
Mass Flow Mass Flow Flow Ranges Pressure P.E.D.
Controller Meter N2 Equivalent Ratings Module H Category
Model: Model: Min. f.s. Max. f.s. Unit
1)
Bar
MF50 S MF60 S
2)
0.003 30 l
n
/min. 100 bar S.E.P.
MF51 S MF61 S 20 100 l
n
/min. 100 bar S.E.P.
MF53 S MF63 S 100 2500 l
n
/min. 70 bar 1 for all 150 lbs
anges 2 for all
other connections
MF64 S 18 2160 m³
n
/h See pressure matrix
Table 5-2
1) referring to normal conditions, i.e. 0°C 1013.25 mbar
2) MF60 can be used at 300 bar
Section 5: Specication