Brooks MFM - Table 2-3: Electrical Connection 6-Pins Terminal

Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
14
Table 2-3: Electrical connection 9-pins terminal
Signal Output (pins 4,5 and 6)
(Pin 4 and 5) indicates the ow rate, represented by a 0-5 Vdc or 1-5 Vdc
signal proportional to the mass ow. (Pin 4 and 6 ) indicates the ow rate,
represented by either a 0-20 mA or 4-20 mA signal current proportional to the
mass ow. Both the current and voltage signals are returned via (pin 4)
NOTE: I/O conguration to be dened at time of ordering. Reconguration at
customer side can be accomplished using digital communication.
NOTE: With regard to the power supply connections, the attached cable must
be as short as possible to ensure that the minimum required voltage and
current is available at the mass ow device.
Cable Shielding Earth
Cable requirements
Compliance with EMC directive 89/336/EEC, requires that the equipment be
tted with fully screened signal cables with at least 80% shielding. The cable
shielding should be connected to the PG connector’s metal shell, and have
360° shielding at both ends. The shielding should be connected to an earth
terminal.
For translations of this instruction, see Appendix D: Translations of CE
Marking electrical installation instructions.
pin *Function Controller Meter
1 VSUP
+ 15 Vdc to +28 Vdc Power supply ••
2SUPCOMPower supply common••
a.na.ndevreseRCN3
4SIGCOM Flow signal output common ••
5 VSIG0 (1)-5 Vdc Flow signal output• •
6ISIG0 (4)-20 mA Flow signal output ••
* Abbreviation for the function description can be found under the top cover
Section 2: Installation