Brooks MFM - 2.8 Electrical Interfacing (Non-Profibus)

Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
12
2.7 In-Line Filter
An in-line lter is installed, as standard, in the instrument’s inlet to prevent any
foreign material entering the ow sensor or control valve. The ltering element
should be periodically replaced or ultrasonically cleaned. Apply only clean
gasses on Mass Flow Meter / Controllers.
2.8 Electrical Interfacing (not for Probus)
The installation of Smart TMF involves connecting to terminal strips. For
details of correct installation, see gure 2-2 and Table 2-2, 2-3 and 2-4.
Table 2-1: Pin conguration
Figure 2-2: Electrical compartment
Table 2-2: Electrical connection 9-pins terminal
PIN NO: FUNCTION
1 VSUP +
2 SUPCOM
3 NC
4 SIGCOM
5 VSIG
6 ISIG
1 TxD / A+
2 RxD / A-
3 TTLALM
4 VREF
5 VOR
6 NC
7 CMDCOM
8 VCMD
9 ICMD
pin *Function Controller Meter
1TxD/A+RS-232/RS-485 TxD/A+ ••
2RxD/A-RS-232/RS-485 RxD/A- ••
3 TTLALM(TTL) Open collector alarm output ••
4VREF+5 Vdc ref. output••
5VOR Valve override input•n.a.
••detcennoc toNCN6
7CMDCOMSetpoint return (-)•n.a.
8VCMD0 (1)-5 Vdc Setpoint input (+)• n.a.
9ICMD0 (4)-20 mA Setpoint input (+) •n.a.
* Abbreviation for the function description can be found under the top cover
Section 2: Installation