Brooks MFM - 1.2 Product Description

Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
6
1.2 Description
Models MF60S, MF61S, MF63S and MF64S Brooks MF-series Smart Mass
Flow Meters are primarily used to provide accurate measurements of gas
ows. The heart of these systems is the thermal mass ow sensor, which
produces an electrical output signal as a function of ow rate.
In addition, models MF50S, MF51S and MF53S Brooks MF-series Smart
Mass Flow Controllers control gas ows. The ow ranges per model are listed
in Table 1-1.
Table 1-1: Flow ranges per model.
* refers to ‘normal’ conditions, i.e. 0°C, 1013.25 mbar.
The Brooks MF-series Smart Mass Flow Meter is a stand-alone instrument
with microprocessor-based electronics on board. The MF-series Smart Mass
Flow Controller has an integrally-mounted control-valve module with which
table gas ows can be achieved.
MASS FLOW METERS
• The supplied inlet adapter has a built-in, upstream inlet lter for ow
straightening. Besides reducing the effects of changes in upstream piping,
this also protects the measuring element from occasional debris in the ow
stream. In addition, it eliminates the need for extra (expensive) inlet ltering.
• Flow signal adjustable via software: (not for Probus)
0-5 Vdc or
1-5 Vdc or
0-20 mA or
4-20 mA
• Output damping provides a constant scale reading under uctuating ow
rate conditions. Standard factory setting: 0.5 sec. (not for Probus)
• Output limiting prevents possible damage to delicate acquisition devices by
limiting the output to 0-5.25 Vdc on the voltage signal output and 0-21 mA
on the current output. (not for Probus)
• An alarm (TTL open collector) signal output is available to the user. If the
instrument’s specications are exceeded, either by process conditions or by
the device itself, an alarm signal can be generated.
Note:
Digital output (communication) is simultaneously available with analogue
output (not for Probus).
Section 1: Introduction
Mass Flow Mass Flow Flow Ranges
Controller Meter
Model: Model: min. f.s. max. f.s. Unit *
MF50 S MF60 S 0.00 30 ln/min.
MF51 S MF61 S 20 100 ln/min.
MF53 S MF63 S 100 2500 ln/min
MF64 S 18 2160 m³n/h