Brooks MFM - Table of Contents

Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
4
Table of Contents
Section 1: Introduction ............................................................................................................................................ 5
1-1 How to use this manual........................................................................................................................ 5
1.2 Description ........................................................................................................................................... 6
Section 2: Installation .............................................................................................................................................. 9
2.1 General ................................................................................................................................................ 9
2.2 Receipt of equipment ........................................................................................................................... 9
2.3 Recommended storage practice .......................................................................................................... 9
2.4 Return Shipment ................................................................................................................................ 10
2.5 Gas connections ................................................................................................................................ 10
2.6 Mechanical Installation ....................................................................................................................... 11
2.7 In-Line Filter ....................................................................................................................................... 12
2.8 Electrical Interfacing (not for Probus) ............................................................................................... 12
2.9 Electrical interfacing Probus MF....................................................................................................... 15
2.9.1 Main connector (MF series) ............................................................................................................ 15
2.9.2 Probus connector (MF series) ....................................................................................................... 16
2.10 Digital Communication ..................................................................................................................... 17
2.11 Interconnection with Peripheral Equipment ...................................................................................... 20
2.12 Interconnection ................................................................................................................................ 20
Section 3: Operation ............................................................................................................................................. 21
3.1 Operating Procedure .......................................................................................................................... 21
3.2 Zero Adjustment ................................................................................................................................. 21
3.3 Calibration Procedure ........................................................................................................................ 21
Section 4: Maintenance......................................................................................................................................... 22
4.1 General .............................................................................................................................................. 22
4.2 Troubleshooting.................................................................................................................................. 22
4.3 Cleaning Procedures.......................................................................................................................... 24
4.4 Calibration Procedure ........................................................................................................................ 24
4.5 Valve (Dis)Assembly Procedure ......................................................................................................... 25
4.6 Housing (Dis)Assembly Procedure .................................................................................................... 25
Section 5: Specication ......................................................................................................................................... 26
Section 6: Modellisting .......................................................................................................................................... 31
Appendix A: Gas Conversion Tables ...................................................................................................................... 36
Appendix B: Dimensional Drawings ....................................................................................................................... 40
Appendix C: Translation of CE Marking electrical installation instructions ............................................................. 42
Appendix D: Important Safety Instructions ............................................................................................................. 47
Figures
Figure 2-1: mechanical installation ......................................................................................................................... 11
Figure 2-2: Electrical compartment......................................................................................................................... 12
Figure 2-3: Open Collector ..................................................................................................................................... 13
Figure 2-4: MF Probus Main Power Connection ................................................................................................... 15
Figure 2-5: Pinnumbering ....................................................................................................................................... 16
Figure 2-6: p.c. boards with the locations of jumper switches ................................................................................ 17
Figure 2-7: RS-232 interconnection of TMF and PC (not for Probus) .................................................................. 19
Figure 2-8: RS-485 multidrop interconnection TMFs and PC................................................................................. 19
Tables
Table 1-1: Flow ranges per model. ........................................................................................................................... 6
Table 2-1: Pin conguration .................................................................................................................................... 12
Table 2-2: Electrical connection 9-pins terminal ..................................................................................................... 12
Table 2-3: Electrical connection 6-pins terminal ..................................................................................................... 14
Table 2-4: Dipswitch settings (not for Probus) ...................................................................................................... 18
Table 4-1: Bench Troubleshooting .......................................................................................................................... 23
Table 5-1: Flow ranges and pressure rating ........................................................................................................... 27
Table 5-2: Pressure Matrix ..................................................................................................................................... 30
Gas Conversion Table ............................................................................................................................................ 37