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Brooks MFM - 2.3 Return Shipment and Gas Connections

Brooks MFM
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Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
10
2-4 Return Shipment
Prior to returning any instrument to the factory visit the Brooks website www.
BrooksInstrument.com for a Return Materials Authorization Number (RMA#),
or contact one of the following locations:
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hateld, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel (215) 362-3700
Fax (215) 362-3745
E-mail: BrooksAm@BrooksInstrument.com
www.BrooksInstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel 011-81-3-5633-7100
6710 BK Ede, Netherlands Fax 011-81-3-5633-7101
Tel 31-318-549-300 Email: BrooksAs@BrooksInstrument.com
Fax 31-318-549-309
E-mail: BrooksEu@BrooksInstrument.com
Instrument must have been purged in accordance with the following:
All ow instruments returned to Brooks requires completion of Form RPR003-1,
Brooks Instrument Decontamination Statement, along with a Material Safety
Data Sheet (MSDS) for the uid(s) used in the instrument.
Failure to provide this information will delay processing by Brooks personnel.
Copies of these forms can be downloaded from the Brooks website
www.BrooksInstrument.com or are available from any Brooks Instrument
location listed above.
2.5 Gas connections
All models are tted with the following inlet and outlet connectors as standard:
NPT(F), tube compression ttings, VCR, VCO, DIN or ANSI anges. Prior to
installation, make certain that all piping is clean and free of obstruction. Install
the piping in a manner that permits easy access to the instrument, should it
need to be removed for cleaning or test-bench troubleshooting.
Section 2: Installation

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