Brooks MFM - Section 5: Specification

Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
26
Section 5: Specication
PERFORMANCE SPECIFICATIONS
Flow Accuracy ± 0.7% of rate and ±0.2% f.s. at calibration conditions
or ± 0.5% of rate and ±0.1% f.s. at calibration
conditions on request ± 1% f.s. for model MF63/53
above 1100 ln/min.
Repeatability ± 0.25% of rate
Rangeability 50:1 (within specied accuracy)
Controllability 100:1 (i.e. total operating range)
Stability Less than ± 0.5% of rate per year
Temperature Less than 0.015%/°C of rate shift from original
Effect Calibration over 0 - 70°C. For owrates over 100 l/min
(after re-zeroing) gas and ambient temperatures must be equal.
PHYSICAL SPECIFICATIONS
Materials of Wetted parts stainless steel with Viton
®
,
Construction Buna-N
®,
PTFE/Kalrez
®
or EPDM seals
Mechanical NPT(F), Tube compression, VCR and VCO
Connections Option:
Flanged DIN- or ANSI type available
Electrical Terminal strip, accessible via PG 11cable gland.
Connections Or xed cable with ying leads.
SPECIFICATIONS
Certication * EMC Directive (89/336/EEC)
EN 61326-1: 1997 + A1: 1998
* ATEX Directive (94/9/EC)
KEMA 98ATEX4887 X - Type n Certicate
EN 50021: 1999
EN 50281-1-1: 1998 +A1
* Pressure Equipment Directive (97/23/EC)
* UL and cUL listed with 1/2 inch NPTF or M20 x 1.5mm
conduit connector for: Class I
Division 2 Groups A,B,C,D and Class II Division 2,
Groups F and G and Class III Class I Zone 2 Group
IIC, IIB, IIA T3C,
Ambient/gas temperature 40°F - 150°F
(5°C - 65 °C) Class 2
Power Supply, 28 Vdc max., 370 mA for controllers
and 90 mA for meters