Brooks MFM - Gas Conversion Table

Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
37
)3m/gk( ytisneDrotcaf ecifirOrotcafsaGalumroFemansaG
371,179,0516,02H2C)enyhtE( enelytecA
392,1810,1899,0erutxiMriA
787,1991,1874,04H3C enellA
177,0187,0687,03HN ainommA
487,1591,1593,1rA nogrA
874,3166,1457,03HsA enisrA
722,5440,2344,03LCB edirolhcirT noroB
520,3965,1975,03FB ediroulfirT noroB
608,7205,2782
,05FrBediroulfatneP enimorB
801,6412,2934,03FrB ediroulfirT enimorB
561,7793,2623,03FrB2CenelyhteoroulfirtomorB
Bromotrifluoromethane (f-13B1) CBrF30,412 2,3036,615
194,2314,1453,06H4C eneidatuB-3,1
395,2764,1752,001H4C enatuB
305,2534,1492,08H4C enetuB-1
305,2534,123,08H4C enetuB-2-SIC
305,2534,1192,08H4C enetuB-2-snarT
779,1552,147,02OC ed
ixoiD nobraC
393,356,1836,02SC ediflusiD nobraC
52,11599,0OC edixonoM nobraC
68,6543,2443,04LCC edirolhcarteT nobraC
Carbon Tetrafluoride (f-14) CF40,441,773,926
540,2555,1765,02FOC ediroulF lynobraC
86,2364,186,0SOC edifluS lynobraC
412,3895,1678,02LC enirolhC
110,3455,1396,02OLC edixoiD enirolhC
521,4218,1334,03FLC ediroulfirT enirolhC
Chlorodifluoromethane (f-22) CHCLF2 0,5051,773,906
Chloroform
(Trichloromethane) CHCL30,442 2,0665,34
Chloropentafluoroethane (f-115) C2CLF5 0,243 2,3977,165
802,5440,2733,03FLC2CenelyhteoroulfirtorolhC
Chlorotrifluoromethane (f-13) CCLF30,431,985 4,912
431,4818,1432,0LC9H4CenatuborolhC-2
223,2663,1894,02)NC( negonayC
37,284,1816,0NCLC edirolhC negonayC
194,2314,1783,08H4C enatubolcyC
778,1422,1505,06H3C enaporpolcyC
771,0973,0599,02D muiretueD
532,11844,06H2B
enarobiD
Diboromodifluoromethane (f-12B2) CBr2F2 0,363 2,6528,768
1,2-Dibromotetrafluoroethane (f-114B2)C2Br2F4 0,2152,905 10,53
Dichlorodifluoromethane (f-12) CCL2F20,392,099 5,492
Dichlorofluoromethane (f-21) CHCL2F 0,4561,985 4,912
605,4798,1244,02LC2HiS enalisorolhciD
49,3577,1381,0iS21H4CenalislyhtdeiD
2,2 Dichloro- 1,1,1- Trifloroethane C2HCL2F30,259 2,3366,829
1,2-Dichloroethane (Ethylene dichloride)C2H4CL2 0,3821,879 4,419
1,2-Dichlorotetrafluoroethane (f-114)C2CL2F40,231 2,4497,479
1,1-Difluoro-1-Chloroethane C2H3CLF2 0,341 1,9574,776
49,2635,1514,02FHC3HC enahteoroulfiD-1,1
68,2215,1854,02FC:2HC enelyhteoroulfiD-1,1
Difluoro
methane (f-32) CF2H20,627 1,36 2,411
Gas Conversion Table
Appendix A
Gas Conversion Table: (Source J-836-D-508 Rev. 14)