Brooks MFM - Page 28

Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
28
Power +15Vdc to +28Vdc (use only 24 Vdc for NO
requirements valves and for use of MF51) +24Vdc only for all
Probus units
Power Consumption Models MF60 S, MF61 S, MF63 S and MF64 S
Mass Flow Meters for + 24 Vdc (± 10%) at 80 mA
for + 15 Vdc (± 5%) at 90 mA
Also applicable for Probus
Power Consumption Models MF50 S, MF51 S and MF53 S
Mass Flow for + 24 Vdc (± 10%) at 140 mA
Controllers for + 15 Vdc (± 10%) at 185 mA
Also applicable for Probus
NOTE: With valve override function activated:
the total power consumption specications are:
for + 15 Vdc at 285 mA or
for + 24 Vdc at 370 mA
Also applicable for Probus
Temperature Both ambient and process gas: 0-70 °C.
Leak Integrity Outboard: 1 x 10
-9
mbar l/sec. Helium
Security To prevent “unauthorized” setting or reranging of
span or zero, these functions are only accessible
via the Brooks Smart Control, model 0160, or
using Smart DDE, model 0162.
Warm-up time < 10 minutes; 1% F.S. accuracy.
Performance within specications: 45 minutes.
Damping Damping from 0 to 10 seconds is possible for
(not for Probus) the ow output signal (default setting is 0.5 sec.)
Response Standard response of the ow output signal 1 sec.
(Meters) Response of better than 0.2 seconds on request.
Settling Time Standard 1 sec. Settling time or up to 0.2 seconds
(Controllers) is possible (to within 2% full scale of nal value)
for any command (Set point) step; virtually
without any dead time, over- or undershoot.
Model MF53S 3 sec. (1 sec. on request).
Section 5: Specication