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Brooks GF120XSL Series User Manual

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2-3
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Section 2 Product Descripton
2-4 Specifications for GF Series Controllers
Materials of Construction
Gas Path SEMI F20 Compliant
Surface Finish 4 µ in Ra (0.1 µm Ra)
Seals Metal
Weight 2.6 lbs (1.20 kg)
Electrical
Power Consumption 545 mA (max) @ 11 Vdc and 250 mA (max) @ 24 Vdc
6 watts (max) @ +15 Vdc
Service Port EMC 89/336/3EEC (CE), ODVA, RoHS/WEEE
Performance
Leak Integrity (external) 1 x 10
-11
atm. cc/sec He
Valve Shut-Down (leak-by) 1% full scale N.C.
2% full scale N.O.
Warm-Up Time 30 minutes
Operating Conditions
SH40-SH44 SH45-SH46 SH47-SH48 SH49-SH50
Flow Range 3-860 sccm 861-7200 sccm 7201-30000sccm 30001-55000sccm
Proof Pressure 140 psia max 140 psia max 140 psia max 140 psia max
Differential Pressure* 7-45 psid 10-45 psid 15-45 psid 25-45 psid**
Valve Configuration Normally Closed Normally Closed Normally Closed Normally Closed
Valve Configuration Normally Open Normally Open Normally Open Normally Open
Temperature Range 10
o
C-50
o
C10
o
C-50
o
C10
o
C-50
o
C10
o
C-50
o
C
*Argon gas applications require an additional 10 psid differential pressure. Unless otherwise stated, all
specifications and features comply with factory calibration conditions.
**Argon gas limited to 55,000 sccm on actual Argon gas.

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Brooks GF120XSL Series Specifications

General IconGeneral
BrandBrooks
ModelGF120XSL Series
CategoryController
LanguageEnglish

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