Brooks GF120XSL Series User Manual

A-1
GF Series
Installation and Operation Manual
X-TMF-GF Series-MFC-eng
Part Number: 541B137AAG
March, 2010
Appendix A: Product Description Code
Table A-1 GF125 Product Description Code Table
C
SH40
010C VX A O *DX XXXX A A 000GF125 C XX
VX
CX
DX
WX
YX
AX
BX
LX
EX
A
V
XXXX
===>
SH40
SH41
SH42
SH43
SH44
SH45
SH46
SH47
SH48
SH49
SH50
===>
010C
030C
092C
280C
860C
2.6L
7.2L
015L
030L
040L
055L
GF125
XX
HA
Configurable
Gas Specific
Pressure Transient Insensitive (PTI) Flow Ranges from 3 sccm–30 slpm
N
2
Equivalent
Standard Application
High Accuracy Calibration
Normally Closed Valve
1-1/2" VCR 1/4"
1-1/8" C Seal 92 mm
1-1/8" C Seal 80 mm
1-1/8" W Seal 92 mm
1-1/8" W Seal 80mm
1-1/2" C Seal 92 mm
1-1/2" W Seal 92 mm
1-1/8” C Seal 92mm w/ Poke Yoke
1-1/2" W Seal 80 mm
Atmosphere
Vacuum
5 Pin DeviceNet™ M8 w/Anolog
5 Pin DeviceNet™ M8
Cable to Cardedge (w/out VTP), RS485 through RJ11 Jacks;
Display & Overlay w/180° Orientation
9 Pin D with RS-485 (UDG9), Display/Overlay w/180° Orientation
9 Pin D with RS-485 (UDG9)
Cable Adapter to MKS 15 Pin D (UDK 15)
Auto Shut Off (Included)
Auto Shut Off (Not Included)
Customer Special Request Number
Standard Flow Sensor (Default)
Specify Gas Code and Range, i.e. “0004” = Argon and “0104” = 10 slpm
Standard Configuration # 40, 3–10 sccm N
2
Equivalent
Standard Configuration # 41, 11–30 sccm N
2
Equivalent
Standard Configuration # 42, 31–92 sccm N
2
Equivalent
Standard Configuration # 43, 93–280 sccm N
2
Equivalent
Standard Configuration # 44, 281–860 sccm N
2
Equivalent
Standard Configuration # 45, 861–2600 sccm N
2
Equivalent
Standard Configuration # 46, 2601–7200 sccm N
2
Equivalent
Standard Configuration # 47, 7201–15000 sccm N
2
Equivalent
Standard Configuration # 48, 15001–30000 sccm
Standard Configuration # 49, 30001–40000 sccm
Standard Configuration # 50, 40001–55000 sccm
N
2
Equivalent
A
X
Auto Zero (Included)
Auto Zero (Not Included)
A
X
0°C Reference Calibration (Standard)
21°C Reference Calibration (Normal)
Customer to Specify Temperature
000
021
XXX
C
O
C
X
O
BB
DX
EX
GX
G1
KX
Normally Open Valve
N
N
2
2
Equivalent
Equivalent
Example:

Brooks GF120XSL Series Specifications

General

Brand	Brooks
Model	GF120XSL Series
Category	Controller
Language	English