Specications
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Chapter 13 Specications
Device Parameters
Density 0.10 to 99.999 [g/cm3]
Z-Factor 0.10 to 15.00
Coating
Density 0.100 to 99.999 [g/cm3]
Z-Factor 0.00 to 15.000
Rate Set-point 0.00 to 9999.99 [Å/s]
Thickness Set Point 0.00 to 9999.99 [KÅ]
Proportional Gain 0.00 to 9999.00 [s]
Integral Time 0.00 to 99.9 [s]
Derivative Time 0.0 to 99.9 [s]
Rise to Soak 0.10 to 9999.9 [s]
Soak Time 0.00 to 9999.99 [s]
Soak Power 0.00 to 100.00 [%]
Rise to Predeposit 0.00 to 999.99 [s]
Predeposit Time 0.00 to 9999.99 [s]
Predeposit Power 0.00 to 100.0 [%]
Dwell Time 0.0 to 9999.9 [s]