Colnatec Eon - Measurement; Process Display; Communications

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Chapter 13 Specications
Measurement
Frequency Resolution +/-0.002 [Hz]
Display Rate 10x to 1x per second
Crystal Frequency Range 6 [MHz]
Filter 0-1
Alpha 0-1
Process Display
Film Selected Material
Layer Layer Being Deposited
Rate 0.00 to 99.9 [Å/s]
Thickness 0.00 to 999.9[KÅ]
Frequency -3.00 to 6,500,000 [Hz]
Run Time Hh/mm/ss
Temperature 0 to 999.9 [°C]
Health 0.00 to 100 [%]
Communications
Factory Set RS-232 [PC version]