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Appendix B Quick Commands
Selecting sensor and source of layer
Co-Deposition
1. In the Program screen, select the layer to which a sensor/source will be added.
2. Click on the Sensor/Source selection animation to change the sensor/source
combination.
Sequential Deposition
3. In the Program screen, select the layer to which a sensor/source will be added.
4. In the Layer Properties list, scroll down to the Sensor or Source row and
double-click.
5. In the new window, click the animation until the desired sensor/source setup is
displayed
6. Click OK.
Heater control
Activating the heater
1. Press the Heater Control button to enter the Heater Control screen.
2. Select the Process list and, then, the heater process to be run.
3. Press the Activate Heater button under the Settings list.
Shutting off the heater
1. Press the Heater Control button to enter the Heater Control screen.
2. Press the Heater Shutoff button under the Settings list.
Note: Abort does NOT shut off the heater!
Creating a heater process
1. Press the Heater Control button to enter the Heater Control screen.
2. Press the New button located under the Heater Process list.
3. In the new window that appears, enter the desired name for the new heater
processes.
4. Click OK.
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