Max300-LG : Description - Specifications - Installation Guide
Extrel
Core Mass Spectrometers
Page 6
flanges to connect to the chamber. The RF (electrical) connection for the quadrupole is a
3-3/8 inch flange on the top of the chamber. A port for the vacuum gauge is on the
chamber side, in line with the turbo pump. To ensure proper operation, maintenance of
the mass spectrometer hardware is required.
Vacuum Pumps
To maintain a high level of vacuum within the chamber, a Pfeiffer Duo 2.5 mechanical
pump and a Pfeiffer TMU 071 turbo pump are used. The turbo pump is connected
directly to the vacuum chamber, while a mechanical (roughing; fore) pump is connected
to the turbo pump. The standard system is provided with a 60 L/s (N
2
) turbo pump and a
1.4 CFM rotary vane pump. Figure 1 shows the location of these components.
Note: Pump vendor and/or specifications are subject to change without notice.
Figure 1: Pump Configuration
Note: Pump oil is considered a hazardous material and requires proper disposal
procedures that conform to local regulations.
Optional Vacuum Gauge
An ionization pressure gauge is installed above the turbo pump. This device allows the
user to monitor the pressure in the ionizer region of the vacuum chamber through the
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