FEI Quanta FEG 450 User Manual (English)

To Next Page

The Quanta FEG

250 / 450 / 650

User Operation Manual

Edition

20 August, 2010

FEI Company

Default Chapter3
- Table of Contents3
Chapter 1 Preface9
User Manuals9
- The User Safety Manual9
- The User Operation Manual9
How to Use this Manual10
Chapter 2 System Overview11
How Quanta FEG SEM Works11
- Vacuum System12
- Image Viewing and Capture13
- Positioning of the Stage13
System Layout of Quanta FEG14
- Software Interface Elements14
- Hardware Interface Elements14
Quanta FEG Options17
Chapter 3 System Operation19
Quanta FEG Vacuum System20
Vacuum Statuses21
- Pump Button21
- Vent Button21
Vacuum Modes22
- High Vacuum (Hivac) Mode22
- Low Vacuum (Lovac) and ESEM Modes22
Quanta FEG System States25
- Power off27
Chapter 4 Software Control29
- Other Software and Hardware29
Software Interface Elements30
- Icons30
- Tool-Tips30
- Pull-Down Menus30
- Command Buttons31
- List Boxes31
- Property Editors31
- Edit Boxes31
- Radio Buttons / Check Boxes31
- Adjusters32
- 2D Controls33
- Modules33
- Dialogues33
- Tabs33
- Progress Bars33
Xt Microscope Server Software34
Xt Microscope Control Software35
- The Title Bar36
- The Menu Bar36
- The Toolbar48
- Image Windows49
- Pages and Modules50
- Preferences57
FEI User Management Software66
- Control Possibilities66
- FEI Account Administrators66
- Account Logging68
Entering Commands in Summary69
- Using the Mouse69
- Using the Keyboard70
Chapter 5 Operating Procedures73
Specimen Preparation and Handling74
- Needed Items74
- Natural Specimen74
- Coated Specimen74
- Mounting the Specimen to the Holder75
- Inserting / Exchanging a Specimen and / or a Detector75
Obtaining an Image76
- Operation Pre-Check76
- Selecting Vacuum Mode77
- Spot Size78
- Obtaining an Image on Screen79
Optimising an Image79
- Principles of SEM Imaging79
- Magnification79
- Scan Speed and Filtering80
- Contrast and Brightness81
- Focusing82
- Correcting Astigmatism82
- Pressure and Working Distance (WD)83
- Digital Imaging Enhancement / Imaging Mixing / Coloring84
Detector Types and Usage86
- Detector Connection87
- Everhart Thornley Detector (ETD)87
- Backscattered Electrons (BSED) and Gaseous Analytical (GAD - Optional) Detectors87
- Large Field Detector (LFD)89
- The CCD Camera89
- Gaseous Secondary Electron Detector (GSED)90
- PLA Cones91
- Discharges between the Gaseous Detectors and the Sample92
- Obtaining Image Procedure for Gaseous Detectors92
Capturing and Handling Single Image93
- Image Types93
- Saving / Opening / Printing94
Recording Movies (Saving Multiple Images)95
- Movie TAB Preferences Dialogue95
- Movie Procedure97
- FEI Movie Creator98
- Playing a Movie100
Measurement and Annotation Functions101
- Tools101
Chapter 6 Alignments103
Quanta FEG System Alignments104
- Common Rules104
- Buttons and Control Elements105
Final Lens Aperture Strip Alignment106
- Aligning Procedure106
Gun Alignment107
Stigmator Alignment109
Stage Rotation Centre110
Emitter Startup111
94 - CCD Camera Alignment113
154 - Water Bottle Venting114
Chapter 7 Stages115
Stages Types and Accessories116
- Quanta FEG 250 - 50 MM Stage116
- Quanta FEG 450 / 650 - 100 / 150 MM Stage117
- Eucentric Position118
- Stage Movement Limits120
Software Stage Functions121
- Map Tab121
- Coordinates Tab123
- Tilt Tab124
- Navigation Tab124
Stage Related Functions125
- Stage Movements125
- Specimen Alignment128
- Scan Rotation (Shift + F12)132
Chapter 8 Maintenance and Troubleshooting133
Cleaning Procedures Overview134
- List of Applied Cleaners134
- Cleaning Column Parts134
- Materials and Technique135
The Standard Insert136
- Removing and Disassembling136
- Housing Cleaning137
- Platinum Apertures Cleaning137
- Platinum Apertures Installing138
Aperture Strip Module139
- Removing the Aperture Rod139
- Replacing the Aperture Module140
- Replacing the Aperture Rod140
Gaseous Detectors141
- Cleaning the GSED / LFD141
- Cleaning the GBSD141
Stage Maintenance142
- Stage Mechanics142
- Specimen Holders142
Refilling the Water Bottle143
Pre-Vacuum Pump Maintenance144
- Periodic Check144
Troubleshooting145
- Diagnostics Auto Report147
- Simple TAD148
Chapter 9 System Options149
Manual User Interface150
Joystick150
Automatic Aperture System151
- Aperture Alignment151
Nav-Cam153
- Capturing Navigation Image Procedure153
- 401 - Nav-Cam Autobrightness154
Optional Detectors155
- Gaseous Back Scattered Electron Detector (GBSD)155
- In Column Detector (ICD)156
- Retractable Detectors Control156
- Scanning Transmission Electrons Microscopy Detector (STEM I)157
- Annular Scanning Transmission Electrons Microscopy159
- Detector (STEM II)161
- Low-Voltage High-Contrast Detector Lens Mounted / Retractable (VCD)162
- Directional Backscattered Detector - Concentric Backscattered Detector (CBS)163
- ESEM & Gaseous Analytical Detector164
- Quad Backscattered Electrons Detector (Quad BSED)164
- Photo Multiplier Tube / Backscattered Electron Detector Autrata, Centaurus (PMT-BSE)165
Energy Dispersive X-Ray (EDX) Analysis166
- The Support PC166
- High Vacuum EDX Analysis166
- LFD EDX Analysis167
- GSED EDX Analysis167
- GAD EDX Analysis168
- STEM EDX Analysis168
Cooling Stage / Waterless Cooling Stage169
- Cooling Stage Parts169
- Cooling Stage Installation172
- Software Control175
- Cooling Stages Basic Operations178
- Water Cooled Temperature Stage Operation Termination180
Wet STEM181
- Wet STEM Basic Operations182
Heating Stage 1000 °C / Heating Stage 1500 °C183
- Heating Stages Parts183
- Heating Stage Installation188
- Software Control189
- Heating Stages Basic Operations192
- HS Maintenance196
Cryocleanerec198
- Parts and Accessories198
- Cryocleaner Operation199
- Maintenance201
- Spare Vessel201
Plasma Cleaner202
- Sample Cleaning Procedure203
- 104 - Plasma Cleaning Alignment204
Quanta Morphologi205
- Sample Preparation205
- Image Acquisition206
- Recommended Settings207
- Symmetrical Low Vacuum Detector (SLVD)208
- Mapping Tool209
Image Analysis210
- Measurement Accuracy Verification210
Remote Imaging213
- Connection to the Microscope PC213
- Microscope Pc's Desktop Sharing214
- Controlling the Microscope Remotely214
Beam Deceleration215
- Detection Principles215
- Stage Modification216
- Beam Deceleration Applications217
- Beam Deceleration Module217
Specimen Holder Kit Option219
- Location Positions219
- Older Interface Adapter220
- Interface Pillar220
- Multi-Holders221
- Polished Mount Holders222
- Clamp Stubs222
- Torx Drivers222
Quick Loader223
- General Description223
- Installation226
- Operations227

Need help?

Do you have a question about the FEI Quanta FEG 450 and is the answer not in the manual?

FEI Quanta FEG 450 Specifications

General

Electron Source	Field Emission Gun (FEG)
Magnification	Up to 1, 000, 000x
Accelerating Voltage	200 V to 30 kV
Stage	Motorized 5-axis stage
Detectors	Gaseous Secondary Electron Detector (GSED)
Software	User-friendly software for data acquisition and analysis

Related product manuals

FEI Quanta FEG 450 User Manual

Table of Contents

FEI Quanta FEG 450 Specifications

Related product manuals