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FEI Scios 2 - User Manual

FEI Scios 2
224 pages
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User Operation Manual
Edition 1
Mar-2017

Table of Contents

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Summary

Chapter 1 System Overview

FEI Microscope Systems Safety Manual

Provides information for personal safety and maintenance procedures while operating the FEI system.

User Operation Manual

Describes system capabilities and necessary topics for safe and proper microscope operation.

System Capabilities

Details the Scios system as a combination of SEM and FIB, highlighting its integrated functionalities.

System Performance

Explains the main instrument components used for imaging and their basic functions.

Chapter 2 System Control

System Layout

Describes the basic system layout based around the dedicated Microscope PC and optional components.

Interface Elements

Details software components, password policy, hardware overview, and power button states.

System States

Defines the different system states: Complete shutdown, Standby, Overnight, and Full operation.

Vacuum System

Explains the High Vacuum and Low Vacuum variations and their respective sections and operations.

Equipment

Covers detector types, applications, stages, and accessories integrated into the system.

Chapter 3 Software Control

Software Interface Elements

Describes icons, tool-tips, menus, command buttons, property editor, edit boxes, and radio buttons.

xT microscope Server Software

Explains the server application that starts and stops microscope functions and the user interface.

Microscope Control Software

Details the user interface elements like menu bar, toolbar, imaging area, and control pages.

Preferences Dialog

Covers settings for movie, alignments, magnification, sensitivity, scanning, presets, units, general, and low vacuum.

FEI Account Manager application

Explains how to organize user accounts, create/remove accounts, and manage settings and passwords.

Entering Commands in Summary

Summarizes mouse and keyboard commands, including key shortcuts for various functions.

Chapter 4 Alignments

Alignments List

Lists grouped alignment procedures for Electron Beam, Ion Beam, Stages, EasyLift, and Others.

Automatic Alignments

Describes how to run alignment procedures automatically and manage progress windows.

Magnification Correction

Utility to enhance factory calibration accuracy under user-selectable conditions.

E-Column: Aperture Selection

Procedure to change apertures when imaging quality is poor.

E-Column: Preventive Maintenance

User-level alignment ensuring electron beam centering, executed regularly.

E-Column: Supervisor Alignments

Set of supervisor-level alignments including sample, aperture, source tilt, image shift, and focus centering.

100 - ION: Source Control

Procedure to start/stop ion source emission, monitor LMIS status, and heat the Ion Source.

I-Column: Aperture Management

Alignment procedure controlling the ion beam aperture strip holes condition.

Stage Alignments

Set of stage alignments allowing complete adjustment of the stage and universal holder.

Chapter 5 Operating Procedures

Specimen Preparation and Handling

Guidelines for preparing samples, handling them, and using the specimen baking unit.

Optimizing Imaging

Covers principles of SEM imaging, magnification, scan speed, contrast, brightness, focusing, and adjustments.

Standard Detectors

Details standard detectors like ETD, LVD, and Trinity detectors, including their settings and operation.

Capturing and Handling Single Image

Describes image capturing, types, file formats, saving, opening, and printing procedures.

Recording Movies (Saving Multiple Images)

Explains how to capture dynamic experiments, movie settings, and use the movie creator.

Stage Control

Covers eucentric position, sample positioning, stage modules, movements, and alignments.

Patterning & milling

Details patterning processes, types, control modules, and milling techniques.

Chapter 6 Maintenance

Cleaning Procedures Overview

Provides an overview of cleaning procedures and lists applied cleaners for maintenance.

Aperture Strip Module

Details the aperture strip module, including removing and replacing the aperture rod and module.

Shutter

Explains shutter aperture function, installation, and exchange procedure for protection.

Stage

Covers stage mechanics, cleaning stage parts, and recommended cleaning procedures for specimen holders.

Refilling Water Bottle

Procedure for refilling the water bottle in the instrument, including safety precautions.

Chapter 7 System Options

Manual User Interface (MUI)

Describes the MUI's knobs for controlling magnification, beam shift, focus, and other parameters.

Uninterruptible Power Supply (UPS)

Explains the UPS function for maintaining vacuum during power failures and safe mode procedures.

Optional Detectors

Details various optional detectors like Trinity, ICE, DBS, GAD, and STEM detectors.

Energy Dispersive X-ray (EDX) Analysis

Explains EDX analysis, its use in SEM, and procedures for High Vacuum, Low Vacuum, and STEM EDX.

EasyLift

Covers the EasyLift tool for sample manipulation, module control, and basic procedures like milling.

MEMS - Heating Stage

Details the MEMS heating stage for controlling sample temperature and its installation.

Beam Deceleration

Explains the Beam Deceleration mode, detection principles, and imaging procedures.

Quick Loader

Describes the Quick Loader for sample transfer, its description, loading, and unloading procedures.

Plasma Cleaner

Details the Plasma Cleaner for contamination removal and sample cleaning procedures.

Specimen Holder Kit Option

Covers the Specimen Holder Kit, its components, location positions, and types of holders.

FEI Scios 2 Specifications

General IconGeneral
BrandFEI
ModelScios 2
CategoryMicroscope
LanguageEnglish

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