Alignments: Stage Alignments
C O N F I D E N T I A L – FEI Limited Rights Data4-20
Stage Alignments
The set of stage alignments allows complete adjustment of the
stage and the universal holder.
Stage Rotation Center
The stage rotation has a mechanical center and it is controlled by the Stage module / R value: the stage moves
around its mechanical center. In some cases this is not desired because a rotation around the field of view center
would be more useful – use this alignment to set this situation.
Make sure the stage tilt is zero during alignment. The magnification should be from 500× to 2 000× and the
sample should have a well recognisable feature at least 10 mm from the center to improve accuracy.
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