System Options: MEMS – Heating Stage
C O N F I D E N T I A L – FEI Limited Rights Data 7-23
MEMS – Heating Stage
The MEMS heating stage is used to control the sample temperature from 40 °C to 1 200 °C while observing
sample with the use of FEI electron microscope.
MEMS Parts
• MEMS Controller
• Multi-Sample holder with the MEMS holder dedicated position
• MEMS Holder
• MEMS Chip
FIGURE 7-8 Multi-sample holder / MEMS Holder (top view) / MEMS holder installed
Consumables
FIGURE 7-9 MEMS chips (10 pcs.) / data sheet
To Next Page
Loading...
