C O N F I D E N T I A L – FEI Limited Rights Data 1-1
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System Overview
User Manuals
FEI Microscope Systems Safety Manual
The safety manual provides information for personal safety and maintenance procedures while
operating this FEI system.
This manual is required reading for the end user.
User Operation Manual
The User Manual is delivered in the electronic PDF file only. However, it is possible to print parts of the manual if
this is desired.
It is recommended to read the appropriate User Manual section before operating any microscope function. Most
importantly, you should locate the topics necessary to operate the microscope in the proper way to safely achieve
the best results.
The manual is divided into the following chapters:
1. System Overview (this chapter)
gives overview of the user manuals and system capabilities.
2. System Control
describes the system hardware (interface elements, vacuum system, system states, equipment).
3. Software Control
describes the interface that sets and controls system operation, giving the function of each tool, menu item and
control page.
4. Alignments
explains how to align the equipment to achieve the optimal performance.
5. Operating Procedures
gives procedures for how to use the system features.
6. Maintenance
gives allowed step by step cleaning and maintenance procedures.
7. System Options
explains relevant options that can be integrated into or accessory to the system.
One can take advantage of the searching and navigation possibilities within the PDF file. In addition, the following
conventions are applied:
• A reference to the specific software element is highlighted in italic. For instance:
“Clear the Stage menu / Beam Shift Reset item.”
• Some software functions use shortcuts, which are given beside the heading in the brackets
(for instance: Save (Ctrl + S)) and in the Help menu / Keyboard Shortcuts.
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