C O N F I D E N T I A L – FEI Limited Rights Data 7-1
7
System Options
This chapter covers hardware and software that is an option either integrated in, or accessory to the Scios 2 system
(not all of them are described here).
Caution!
Only optional accessories meeting the manufacturer's specifications shall be used.
• Support PC – connects your work space to the network and can hold some other software utilities.
• Manual User Interface (MUI) – provides direct manual control of microscope parameters such as focus,
magnification, contrast, brightness, beam shift and correcting astigmatism.
• Joystick – brings another possibility to control the basic stage movements.
• Electron Beam Current Measurement
• Ion Beam Current Measurement
• External Scan Interface
• EasyLift micro manipulator for the TEM sample preparation
• Quick Loader
• Nav-Cam
• Charge Neutralizer
• Gas Injection System – Platinum Deposition, Tungsten Deposition, Insulator Deposition II, Delineation Etch,
Insulator Enhanced Etch, Enhanced Etch, Carbon Deposition, Selective Carbon Mill, Gold
• Uninterruptible Power Supply
• Mains Matching and Isolation Transformer – provides a galvanic isolated AC-regulated power source with the 115 /
230 V, 50 / 60 Hz output.
• Compressor 120 V / 230 V, 50 / 60 Hz 4-litre Tank
• Thermo Neslab Water Cooler 50 Hz / 60 Hz
• Acoustic Enclosure for Pre-vacuum Pump
• Specimen Holder Kit
• Set of 20 Specimen Stubs for SEM’s
• UMB Stub Holder Kit
• UMB FIB/TEM Specimen Kit
• Dual TEM Grid Holder
• CryoCleanerEC + spare vessel – anti-contamination device
• Plasma Cleaner
• Annular STEM detector – allows detection of electrons transmitted through the sample. Regular voltage range is
from 30 kV down to around 5 kV, which is of course dependent on the sample thickness.
• Universal Lift-out Holder for STEM observation
• Trinity detector (T3) – In Column detector specially suitable for the Beam Deceleration mode
• Directional Backscattered Detector (DBS)
– Concentric Backscattered Detector
(CBS)
• ICE detector
• Thermal Printer Kit
• Beam Deceleration mode – is used to observe samples, when electron energy is very low and under very low
accelerating voltages.
• Remote Control / Imaging
• SIS Scandium Image software
• SIS Scandium desktop license
• Scandium Solution Height software – enables to create a topographic map of a sample
• SIS webRacer – allows regular users with ID / passwords (provided by the supervisor) to view and retrieve
worldwide database data, using any internet browser and any OS system (PC, Apple, Sun…).
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