System Control: Equipment
C O N F I D E N T I A L – FEI Limited Rights Data 2-15
Stages and Accessories
The chamber is equipped with the 110 × 110 mm stage, which can be oriented with reference to five axes: X, Y, Z,
Rotation and Tilt. All movements are motorised, software controlled (an integrated part of the Microscope Control
software). Stage positions are shown on the screen.
FIGURE 2-7 110 × 110
mm
Chamber
Standard Stub Holder
This is the universal stub holder with a lot of numbered
position for insertion of stubs with attached samples.
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