System Options: Optional Detectors
C O N F I D E N T I A L – FEI Limited Rights Data7-10
Retractable Annular Scanning Transmission Electron
Microscopy Detector
(STEM 3 / STEM 3+)
This is a solid-state diode mounted on a retractable arm.
It works
best at a slow scan conditions.
Note
There are several hardware variations of the STEM 3 / 3+ detector
depending on number of diode segments (8 or 11) and modes (radio
buttons) which are available within the Detector settings module. All
these variations have the same handling and control as described.
Inserting and Retracting STEM 3 / 3+ Detector
Caution!
Always take care of any stage movement which can cause a collision
with the STEM 3 / 3+ detector. Any collision can cause damage of the detector!
Note
When the STEM 3 / 3+ detector is inserted stage rotation and tilt are locked automatically for the safety.
Before insertion of the retractable STEM 3 / 3+ detector, the chamber must be pumped, otherwise the Insert
button is not active (a tooltip occurs under mouse cursor).
When clicking on the Insert button the dialog requires selection of the correct sample holder configuration to enable
safe detector insertion. When the stage is not in a correct position for insertion, another dialog appears requiring a
confirmation of moving it to the safe position.
The Tilt and the Z-axis stage movements are limited to enable safe stage movements.
Retraction of the STEM 3 / 3+ is automatic with the Stopping /
Starting the server or venting the chamber. Otherwise a user can
use the Retract button. When the detector is retracted, the
information text is shown in each display which uses it.
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