System Control: Vacuum System
C O N F I D E N T I A L – FEI Limited Rights Data2-10
Vacuum System
Model difference
There are the High Vacuum and Low Vacuum variations of the
Scios system. This manual describes the Low Vacuum model, for
the High Vacuum one there are some controls missing and a
functionality is modified accordingly.
Within the system there are the following vacuum sections:
• Electron source
• Electron column
• Ion source
• Ion Column
• Specimen chamber
In operation the electron and ion sources and columns sections
are always under high vacuum. The specimen chamber is at the
pressure required for the given state (Pump / Vent) or mode
(HiVac / LoVac).
Note
The ion beam can only be operated in HiVac. When a gaseous mode is chosen, the ion column CIV is closed.
All valve and pump operations are fully automatic.
FIGURE 2-5 Scios HiVac / LoVac Vacuum system
ABV . . . . . . . Auxiliary Bypass Valve
AGV . . . . . . Auxiliary Gas Valve
BPV . . . . . . . By Pass Valve
BG . . . . . . . . Buffer Gauge
BV . . . . . . . . Buffer Valve
HVG . . . . . . High Vacuum Gauge
CIV . . . . . . . Column Isolation Valve
EG . . . . . . . . ESEM Gauge
EBV . . . . . . . Environmental Backing Valve
ChEV . . . . . . Chamber Evacuation Valve
ChIV . . . . . . .Chamber Isolation Valve
IGP . . . . . . . .Ion Getter Pump
NAV . . . . . . .Nitrogen Admittance Valve
NVC . . . . . . .Needle Valve Control
PVP . . . . . . .Pre Vacuum Pump
SIV . . . . . . . .Servo Isolation Valve
TMP . . . . . . .Turbo Molecular Pump
TVV . . . . . . .Turbo Venting Valve
VV . . . . . . . .Venting Valve
WBV . . . . . .Water Bottle Valve
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