Alignments: E-Column: Preventive Maintenance
C O N F I D E N T I A L – FEI Limited Rights Data 4-7
E-Column: Preventive Maintenance
Source Tilt & Shift (Fast)
This user level alignment ensures to center electron beam in the column and should be executed regularly (on a
weekly basis). It takes around 15 to 20 minutes. If it is not successful, run the supervisor level alignment Source DPA
& Tilt & Shift.
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