Alignments:
C O N F I D E N T I A L – FEI Limited Rights Data4-2
Alignments List
Grouped alignments lists are possible to roll down / up by
clicking the + / - sign:
Electron Beam
• Magnification Correction
User magnification calibration (see Beam menu item).
• E-Column: Aperture Selection
Enables to set a second set of final lens apertures in case the
image quality deteriorates (one or more actually used
apertures are worn out).
• E-Column: Preventive Maintenance
The user level electron beam adjustment procedure.
• E-Column: Supervisor Alignments
Set of Supervisor level electron beam adjustment procedures.
Ion Beam
• 100 – ION: Source Control
Used for ion source starting and heating, LMIS recovering,
LMIS state monitoring.
• I-Column: Aperture Management
Controls the ion beam aperture strip holes condition.
• I-Column: Manual Beam Alignment
• I-Column: Alignments
Stages
• Stage Alignments – set of utilities:
– Stage Rotation Center – sets the stage rotation centre for the compucentric rotation.
– Eucentric Height – defines the eucentric position.
– R Zero Alignment – sets zero rotation position of the holder for STEM range definition.
– Tilt Zero Alignment – sets the stage tilt zero position.
– Tilt-X Correction – sets the correction in X direction when tilting the stage.
EasyLift
• EasyLift Needle Exchange/Calibration (option – see Chapter 7)
Others
• 154 – Water Bottle Venting
Enables to vent the water bottle in case of refilling.
• External Plasma Cleaning / Plasma Cleaning
Enables the chamber plasma cleaning and sets duration of the specimen plasma cleaning.
• Pump Buffer
Enables to pump down the vacuum buffer.
• Vacuum Actions (U) – set of utilities:
– Start / Stop IGPs – enables to start / stop vacuum pumps in case of power failure, emergency or service actions
– Pump / Vent Actions (U) – enables to pump / vent particular vacuum system sections
• GIS Alignment (option)
Resets the GIS crucible filling lifetime counter after its exchange, sets the GIS heating temperature and performs
GIS mechanical alignment.
Model difference
Scios 2 High Vacuum has a slightly modified alignments list.
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