FEI Quanta FEG 650 User Manual (English)

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The Quanta FEG

250 / 450 / 650

User Operation Manual

Edition

20 August, 2010

FEI Company

Default Chapter3
- Table of Contents3
Chapter 1 Preface9
User Manuals9
- The User Safety Manual9
- The User Operation Manual9
How to Use this Manual10
Chapter 2 System Overview11
How Quanta FEG SEM Works11
- Vacuum System12
- Image Viewing and Capture13
- Positioning of the Stage13
System Layout of Quanta FEG14
- Software Interface Elements14
- Hardware Interface Elements14
Quanta FEG Options17
Chapter 3 System Operation19
Quanta FEG Vacuum System20
Vacuum Statuses21
- Pump Button21
- Vent Button21
Vacuum Modes22
- High Vacuum (Hivac) Mode22
- Low Vacuum (Lovac) and ESEM Modes22
Quanta FEG System States25
- Power off27
Chapter 4 Software Control29
- Other Software and Hardware29
Software Interface Elements30
- Icons30
- Tool-Tips30
- Pull-Down Menus30
- Command Buttons31
- List Boxes31
- Property Editors31
- Edit Boxes31
- Radio Buttons / Check Boxes31
- Adjusters32
- 2D Controls33
- Modules33
- Dialogues33
- Tabs33
- Progress Bars33
Xt Microscope Server Software34
Xt Microscope Control Software35
- The Title Bar36
- The Menu Bar36
- The Toolbar48
- Image Windows49
- Pages and Modules50
- Preferences57
FEI User Management Software66
- Control Possibilities66
- FEI Account Administrators66
- Account Logging68
Entering Commands in Summary69
- Using the Mouse69
- Using the Keyboard70
Chapter 5 Operating Procedures73
Specimen Preparation and Handling74
- Needed Items74
- Natural Specimen74
- Coated Specimen74
- Mounting the Specimen to the Holder75
- Inserting / Exchanging a Specimen and / or a Detector75
Obtaining an Image76
- Operation Pre-Check76
- Selecting Vacuum Mode77
- Spot Size78
- Obtaining an Image on Screen79
Optimising an Image79
- Principles of SEM Imaging79
- Magnification79
- Scan Speed and Filtering80
- Contrast and Brightness81
- Focusing82
- Correcting Astigmatism82
- Pressure and Working Distance (WD)83
- Digital Imaging Enhancement / Imaging Mixing / Coloring84
Detector Types and Usage86
- Detector Connection87
- Everhart Thornley Detector (ETD)87
- Backscattered Electrons (BSED) and Gaseous Analytical (GAD - Optional) Detectors87
- Large Field Detector (LFD)89
- The CCD Camera89
- Gaseous Secondary Electron Detector (GSED)90
- PLA Cones91
- Discharges between the Gaseous Detectors and the Sample92
- Obtaining Image Procedure for Gaseous Detectors92
Capturing and Handling Single Image93
- Image Types93
- Saving / Opening / Printing94
Recording Movies (Saving Multiple Images)95
- Movie TAB Preferences Dialogue95
- Movie Procedure97
- FEI Movie Creator98
- Playing a Movie100
Measurement and Annotation Functions101
- Tools101
Chapter 6 Alignments103
Quanta FEG System Alignments104
- Common Rules104
- Buttons and Control Elements105
Final Lens Aperture Strip Alignment106
- Aligning Procedure106
Gun Alignment107
Stigmator Alignment109
Stage Rotation Centre110
Emitter Startup111
94 - CCD Camera Alignment113
154 - Water Bottle Venting114
Chapter 7 Stages115
Stages Types and Accessories116
- Quanta FEG 250 - 50 MM Stage116
- Quanta FEG 450 / 650 - 100 / 150 MM Stage117
- Eucentric Position118
- Stage Movement Limits120
Software Stage Functions121
- Map Tab121
- Coordinates Tab123
- Tilt Tab124
- Navigation Tab124
Stage Related Functions125
- Stage Movements125
- Specimen Alignment128
- Scan Rotation (Shift + F12)132
Chapter 8 Maintenance and Troubleshooting133
Cleaning Procedures Overview134
- List of Applied Cleaners134
- Cleaning Column Parts134
- Materials and Technique135
The Standard Insert136
- Removing and Disassembling136
- Housing Cleaning137
- Platinum Apertures Cleaning137
- Platinum Apertures Installing138
Aperture Strip Module139
- Removing the Aperture Rod139
- Replacing the Aperture Module140
- Replacing the Aperture Rod140
Gaseous Detectors141
- Cleaning the GSED / LFD141
- Cleaning the GBSD141
Stage Maintenance142
- Stage Mechanics142
- Specimen Holders142
Refilling the Water Bottle143
Pre-Vacuum Pump Maintenance144
- Periodic Check144
Troubleshooting145
- Diagnostics Auto Report147
- Simple TAD148
Chapter 9 System Options149
Manual User Interface150
Joystick150
Automatic Aperture System151
- Aperture Alignment151
Nav-Cam153
- Capturing Navigation Image Procedure153
- 401 - Nav-Cam Autobrightness154
Optional Detectors155
- Gaseous Back Scattered Electron Detector (GBSD)155
- In Column Detector (ICD)156
- Retractable Detectors Control156
- Scanning Transmission Electrons Microscopy Detector (STEM I)157
- Annular Scanning Transmission Electrons Microscopy159
- Detector (STEM II)161
- Low-Voltage High-Contrast Detector Lens Mounted / Retractable (VCD)162
- Directional Backscattered Detector - Concentric Backscattered Detector (CBS)163
- ESEM & Gaseous Analytical Detector164
- Quad Backscattered Electrons Detector (Quad BSED)164
- Photo Multiplier Tube / Backscattered Electron Detector Autrata, Centaurus (PMT-BSE)165
Energy Dispersive X-Ray (EDX) Analysis166
- The Support PC166
- High Vacuum EDX Analysis166
- LFD EDX Analysis167
- GSED EDX Analysis167
- GAD EDX Analysis168
- STEM EDX Analysis168
Cooling Stage / Waterless Cooling Stage169
- Cooling Stage Parts169
- Cooling Stage Installation172
- Software Control175
- Cooling Stages Basic Operations178
- Water Cooled Temperature Stage Operation Termination180
Wet STEM181
- Wet STEM Basic Operations182
Heating Stage 1000 °C / Heating Stage 1500 °C183
- Heating Stages Parts183
- Heating Stage Installation188
- Software Control189
- Heating Stages Basic Operations192
- HS Maintenance196
Cryocleanerec198
- Parts and Accessories198
- Cryocleaner Operation199
- Maintenance201
- Spare Vessel201
Plasma Cleaner202
- Sample Cleaning Procedure203
- 104 - Plasma Cleaning Alignment204
Quanta Morphologi205
- Sample Preparation205
- Image Acquisition206
- Recommended Settings207
- Symmetrical Low Vacuum Detector (SLVD)208
- Mapping Tool209
Image Analysis210
- Measurement Accuracy Verification210
Remote Imaging213
- Connection to the Microscope PC213
- Microscope Pc's Desktop Sharing214
- Controlling the Microscope Remotely214
Beam Deceleration215
- Detection Principles215
- Stage Modification216
- Beam Deceleration Applications217
- Beam Deceleration Module217
Specimen Holder Kit Option219
- Location Positions219
- Older Interface Adapter220
- Interface Pillar220
- Multi-Holders221
- Polished Mount Holders222
- Clamp Stubs222
- Torx Drivers222
Quick Loader223
- General Description223
- Installation226
- Operations227

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FEI Quanta FEG 650 Specifications

General

Brand	FEI
Model	Quanta FEG 650
Category	Microscope
Language	English

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FEI Quanta FEG 650 User Manual

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