Alignments: Plasma Cleaning / External Plasma Cleaning
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Plasma Cleaning / External Plasma Cleaning
When repeated Tools menu / Sample Cleaning procedure is not effective, click on the Start / Stop Chamber Cleaning
button to start / stop the procedure, Duration of which is much longer.
If longer plasma cleaning time is needed it is recommended to use several shorter plasma cleaning cycles separated
by pumping the chamber down to HiVac mode. Residuals created during plasma cleaning are pumped away and
following plasma cleaning is more effective. Adjust the
Cycle duration
,
Clean cycles
and
Pumping time between cycles
.
Note
If there is an external Evactron plasma cleaner, follow the External Plasma Cleaning alignment instruction and the Evactron
user manual!
WARNING!
Do not use Chamber cleaning when the EDS / WDS / EBSD system is mounted! If you need to clean the system with EDS
detector mounted, use 1 mm collimator and do not exceed 30 minutes once a week at most.
Do not exceed 30 minutes of chamber cleaning once a week at most when the DBS detector is installed.
Do not leave sensitive samples (including Au-C resolution test samples) in the chamber during Chamber Cleaning (they
may be damaged).
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