FEI Scios 2 - Equipment

System Control: Equipment
C O N F I D E N T I A L – FEI Limited Rights Data2-14
Equipment
Detector Types and Application
There are several system detectors, either standard or optional. The Detectors menu shows
all installed detectors, accessibility / inaccessibility of detectors (black / grey label)
depends on the actual system conditions.
Note 
For settings and handling of particular standard (S) / optional (O) detectors see Chapter 5 / 7.
SE = secondary electrons, SI = secondary ions, BSE = back scattered electrons, TE = transmitted electrons, 
S = standard, O = optional, L = Low Vacuum model only
Note 
In case the vacuum safety interlock is activated, the confirmation of switching the detector voltage on after pumping the
system is necessary.
FIGURE 2-6 Safety Interlock Messages
Table 2-2 Scios detectors list
Detector Name Tag Vacuum Mode Detected Signal Note
Everhart-Thornley ETD HiVac SE (tunable energy) / BSE S
T1 T1 HiVac / LoVac BSE (for OptiTilt and OptiPlan
column Use cases)
S
T2 T2 HiVac / LoVac SE (for OptiTilt and OptiPlan
column Use cases)
S
Low Vacuum LVD LoVac SE S
CCD camera CCD light, infra-red light S
External EXT detector-dependent S
T3 T3 HiVac SE (for OptiTilt and OptiPlan
column Use cases)
O
Ion Conversion and Electron ICE electron beam: SE / BSE 
ion beam: SE / SI
O
Retractable Directional
Backscattered (DBS)
ABS / CBS HiVac BSE O
Directional Gaseous
Analytical (05/2015)
GAD – ABS / 
GAD – CBS
LoVac BSE O, LM
Retractable Annular STEM STEM 3 
STEM 3+
HiVac TE O