System Control: Equipment
C O N F I D E N T I A L – FEI Limited Rights Data2-16
Stage movement limits
The motorised movements of the stage can be operated under software control for more advanced location
mapping. This includes Shift, Get, Track and the Stage module functionality. A live imaging can be repositioned
either by the stage movement or by the Beam Shift.
Note
When moving the stage or tilting the specimen, the magnification may need to be reduced not to lose the feature of interest
off the screen.
FIGURE 2-8 Stage Movement Schema
Caution!
The positive Z value direction depends on the Link Z to FWD status (see Chapter 5).
Caution!
If the maximum sample size is near to the limit, stage tilt can be limited. Beware of hitting the objective pole piece!
Table 2-3
Stage Features and Limits
Item 110 × 110 mm Note
X -55 to +55 mm
Y -55 to +55 mm
Z 66 mm
R 360° continuous
T -15° to +90° maximally
Eucentric distance 7 mm / 19 mm Electron / Ion beam
Maximum sample weight No restriction: 500 g including stub holder
No Tilt: 2 000 g
X and Y movements only: 5 000 g
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