Hitachi SEM S-4700 User Manual

SEM Hitachi S-4700 user manual
English Version by Eric, VDEC, Mita Lab, 2015/01/27
Please, leave this manual here. You can find an electronic version in the TakedaCR Wiki:
http://takeda-cr.t.u-tokyo.ac.jp (accessible only from inside Utokyo)
1. Warnings and recommendations
Be sure to read the following remarks:
1.1. This equipment belongs to VAN Partners. Let's handle it with much care,
1.2. Before exchanging the sample, always check that the stage is in its initial position:
X = Y = 12.5mm, Z = 12mm, Tilt = 0˚, θ = 0˚
1.3. This is a simplified manual. It is recommended to read and study the original manual.
2. Terms
2.1. RP = Rotary Pump,
2.2. IP = Ion Pump,
2.3. DP = oil Diffusion Pump,
2.4. S.C. = Specimen Chamber = main chamber,
2.5. S.E.C. = Specimen Exchange Chamber = Load lock chamber.
3. Regular State
Always ON. RP and DP maintain vacuum in the main chamber and IP maintain vacuum in the column.
4. Points to check before starting
If there is an abnormality, contact the person in charge.
On the front panel (below the S.C.), check from left to right:
4.1. EVAC POWER
4.1.1. Switch is ON,
4.1.2. DP/TMP, WATER and AIR PRES switched ON (green lamps ON)
4.2. OBJ. APT. → position HEAT
4.3. ION PUMP VACUUM
4.3.1. Lamps IP1, IP2, and IP3 lighted ON,
4.3.2. Check the IPs vacuum values by rotating the knob. The following should be satisfied:
IP1<2e-7Pa, IP2<2e-6Pa, IP3<7e-5Pa. Fill out the log with the values.
4.4. CHAMBER VACUUM → S.C and S.E.C vacuum are HIGH (green lamps)
4.5. VALVE → GUN switch in position CLOSE. If not, set it to CLOSE
4.6. CHAMBER → switch on S.E.C. (should be protected with a tape)
4.7. If you want to use the cold trap, check that there is more than 1.3L of liquid nitrogen in the Dewar Vessel. If
this is not the case, fetch some nitrogen in CR2.
5. Preparation
5.1. Turn PC on
5.1.1. DISPLAY switch ON (under the PC desk, behind the door),
5.1.2. Windows 95 will startup.
5.1.3. Press CTRL+ALT+DEL.
5.1.4. Launch PC-SEM.exe. There is no password, just click OK,
5.1.5. When the soft start, a dialog showing the X and Y values of the stage appears. Check the real values of X
and Y, enter those values in the box and then click OK,
5.2. Filling liquid nitrogen
If you want to use the cold trap, fill it with 1.3L of liquid nitrogen.
5.3. Set the sample
5.3.1. Select a suitable sample holder,
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Hitachi SEM S-4700 Specifications

General

Brand	Hitachi
Model	SEM S-4700
Category	Laboratory Equipment
Language	English

Summary

Warnings and Recommendations

Equipment Handling and Safety

Handle equipment with care, check stage position, and follow manual recommendations.

Pre-Operational Checks

Verify power, vacuum levels, valve positions, cold trap levels, and system status.

Preparation Procedures

PC and Software Initialization

Turn on PC, start Windows, and launch the SEM application.

Sample Loading and Cold Trap

Prepare sample holder, fill liquid nitrogen, and load the sample into the chamber.

Applying High Voltage

Gun Switch and Flushing Procedure

Set GUN switch to AUTO and perform flushing if required.

Voltage and Current Settings

Set acceleration voltage (Vacc) and emission current (Ie) in the HV Control window.

Adjusting the Electronic Beam

Beam Alignment

Align the beam to center the circular shape on the screen.

Aperture and Stigma Alignment

Adjust aperture alignment and stigma (X, Y) for optimal image quality.

Low Magnification Positioning

Set landmark at high mag, switch to low mag, and re-center using the alignment knob.

Observation and Image Capture

Scan Speed and Focus Adjustment

Select scan speed, adjust focus and stigmatism for sharp images.

Image Capture and Saving

Set picture parameters, take images using the camera icon, and save them.

Taking Out the Sample

Power Down and Stage Reset

Turn off high voltage, reset stage to initial position.

Sample Removal Procedure

Open MV-1, unscrew sample holder, pull rod, close MV-1, and repressurize chamber.

End of Use Procedures

System Shutdown

Set GUN switch to CLOSE, shut down the computer and display.

Logbook Maintenance

Fill out the paper log and the iPod log.