Inficon PEG100 - Sensor Disassembly and Parts; Disassembly of the Sensor

tina14e1-a (2017-12) PE
G
5.2.2 Dis
a
Sen
s
5.2.3 Cle
a
Par
t
5.2.4 Ass
e
G
100.om
a
ssembly
o
s
o
r
a
ning the I
n
t
s
e
mbly of t
h
o
f the
n
dividual
h
e Senso
r
The se
n
(7/2) an
How to
d
1) Use
2) Use
the
p
3) Det
a
Fig. 7
S
In the c
a
steel w
o
blow cl
e
be rem
o
If possi
b
same s
h
cerami
c
taminat
i
The se
n
describ
e
When i
n
remain
s
Moreov
e
When i
n
(7/2) m
u
n
sor consists
o
d the cathod
e
disassemble:
a pair of twe
e
a pair of plie
r
p
liers to and f
r
a
ch the cera
m
S
ensor
Do not da
m
a
se of severe
o
ol or similar
a
e
an with oil-fr
e
o
ved by blowi
n
b
le, the catho
d
h
ould be don
e
c
s protection
d
i
on.
n
sor is reasse
m
e
d in Section
5
n
serting the a
n
s
between the
e
r, make sur
e
n
serting the c
a
u
st not be be
n
o
f the vacuu
m
e
plate (7/5).
S
e
zers to pull t
h
r
s to pull the a
r
o a little.
m
ics disc (7/3)
m
age the seal
contaminatio
n
a
nd then subj
e
e
e pressurize
d
n
g these out
o
d
e plate (7/5)
e
for the anod
e
d
isc (7/3) whic
m
bled in the
r
5
.2.2.
n
ode ring (7/4
wings of the i
e
that the ano
d
a
thode plate (
7
n
t. Therefore i
n
housing, the
S
ee Fig. 7.
h
e cathode pl
a
node ring out
f
rom the curr
e
ing surfaces
o
n
, the inside
o
e
cted to furth
e
d
air or nitrog
e
o
f the housing
.
s
hould be rep
e
ring (7/4) wi
t
h protects the
e
verse order
a
) you must m
a
gnition aid (7
/
d
e ring is lying
7
/5) into the h
n
sert slowly a
n
anode ring (
7
a
te (7/5) out o
from the hou
s
e
nt feed- thro
u
Key to fi
g
1 Mag
n
2 Igniti
o
3 cera
m
4 Ano
d
5 Cath
o
6 Sens
flang
e
o
f the vacuum
o
f the housing
e
r cleaning wi
t
e
n. Any possi
b
.
p
laced by a n
e
t
h the ignition
e
current feed
-
a
s for disass
e
a
ke sure that
a
/
2) and the w
a
g
snug on the
c
ousing the wi
n
nd carefully.
7
/4) with igniti
o
f
the sensor.
s
ing; for this
m
u
gh.
g
. 7:
n
et assembly
o
n aid
m
ics disc
e ring
o
de plate
or housing wi
t
e
flange.
may be clea
n
h alcohol. Fin
b
ly present fla
k
e
w cathode pl
a
aid (7/2) and
-
through agai
n
e
mbly which i
s
a
clearance o
f
a
ll of the hous
i
c
eramics disc
n
gs of the ign
i
15
o
n aid
m
ove
t
h
n
ed with
ally
k
es will
a
te. The
the
n
st con-
s
f
1 mm
i
ng.
.
i
tion aid