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Inficon PEG100 User Manual

Inficon PEG100
24 pages
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4 tina14e1-a (2017-12) PEG100.om
Contents
Product Identification 2
Validity 2
Intended Use 2
Description 2
Unpacking and Checking 2
Design and Function 3
Scope of Delivery 3
1 Safety 5
1.1 Symbols Used 5
1.2 Personnel Qualifications 5
1.3 General Safety Instructions 5
1.4 Liability and Warranty 5
2 Technical Data 6
3 Installation 8
3.1 Vacuum Connection 8
3.2 Electrical Connection 8
3.2.1 Power Supply 10
3.2.2 Switching on the High Tension 10
3.2.3 Measurement Signal Output 10
3.2.4 Status Output 11
3.2.5 Identification 11
4 Operation 12
4.1 Operation 12
4.2 Measurement System Status Indication 13
4.3 Degassing 13
4 Maintenance 14
5.1 The Electronics Assembly 14
5.2 Cleaning the Sensor 14
5.2.1 Detaching the Electronics Assembly 14
5.2.2 Disassembly of the Sensor 15
5.2.3 Cleaning the Individual Parts 15
5.2.4 Assembly of the Sensor 15
5.2.5 Assembly of the Electronics Assembly 16
6 Troubleshooting 16
7 Wearing Parts and Original Spare Parts 17
9 Returning the Product 18
10 Disposal 18
Appendix 19
A: Output Voltage vs. Pressure 19
B: Examples for Connecting 20
EU Declaration of Conformity 21
For cross-references within this document, the symbol ( XY) is used.

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Inficon PEG100 Specifications

General IconGeneral
BrandInficon
ModelPEG100
CategoryIndustrial Electrical
LanguageEnglish