Section 1: S530 system S530 Parametric Test System Administrative Guide
S530-924-01 Rev. D / September 2017
S530 system configuration options
DC source-measure units (SMU)
2 to 8 maximum
Maximum number of SMUs depends on other items in
the system rack
2410 high-voltage SMU
One or two 707Bs with either:
7072-HV switch card
7072-HVD switch card
7530 switch card
Optional capacitance/voltage (C-V)
1 channel of C-V
Based on 4200-SCS with CVU card
DMM7510 7-1/2 Digit Graphical Sampling Multimeter
(quantity: 0 to 1)
Up to three dual-channel pulse cards
Frequency measurement option
Computer inside cabinet
External 24-inch flat-panel monitor and keyboard tray
mounted on exterior of cabinet
S530 system software ā Keithley Test Environment (KTE)
or Automated Characterization Suite (ACS)
LO patch panel
Interlock system (high-voltage systems only)
Adjustable cable support arm
Advanced seismic securement kit for additional
resistance to seismic forces
The LO patch panel and the high-voltage safety interlocks are not visible from the front.
Figure 1: S530 parametric test system configuration example