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Keithley S530 Administrative Guide
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S530 Parametric Test System Administrative Guide
Section 1
:
S530 system
S530-924-01 Rev. D / September 2017
1-3
Optional accessories
Optional items and accessorie
s that may accompany the S530 system:
Cables to connect to the test
fixture or the probe card adapter
9139A
-PCA (probe card a
dapter)
Advanced seismic securement kit
8
10
Table of Contents
Safety Precautions
3
S530 System
7
Optional Accessories
9
S530 Site Preparation and Installation
10
Unpacking the S530 System
11
Unpacking System Components
12
Unpacking the S530 System Accessories
19
Keithley Field Service Engineer Installation Tasks
22
System Cabinet Size and Weight
25
Power and Operating Conditions
26
System Power Dissipation
27
Lockout and Tagout
28
Installation and Connections
29
System Securement
32
Optional Advanced Seismic Securement
34
Equipment Startup
36
Initial Equipment Startup
37
Using Telnet
38
IC Process Log Messages
39
Shut down Using KTE
40
Recovering from an Emergency Shut down
41
Safety Interlocks
42
Prober Safety
43
Maintenance
44
Special Handling of Static-Sensitive Devices
45
Types of Electrical Hazard Tasks
46
General Replacement Procedure
47
Restore System Power
48
Power Distribution and Emergency off
49
Power Distribution Unit Connections and Power Distribution Basics
50
System Emergency off Circuit
52
Data Hub License
53
LO Patch Panel
54
Decommissioning an S530 Test System
55
Instrument Specifications and Documentation
56
Switching
57
Sourcing and Measuring
58
Typical Matrix Connections
59
S530 Low-Current Using DMM7510
61
S530 High-Voltage System Using DMM7510
62
S530 Low-Current Using 4220-PGU Pulse Generator Card
63
S530 High-Voltage System Using 4220-PGU Pulse Card
64
S530 Low-Current Using 4200-SCP2HR Scope Card
65
S530 High-Voltage System Using 4200-SCP2HR Scope Card
66
S530 KTE Communications Diagrams
67
S530 ACS Communications Diagrams
69
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Keithley S530 Specifications
General
Brand
Keithley
Model
S530
Category
Test Equipment
Language
English
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